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Ultralow-temperature high-vacuum atomic force microscope system

An atomic force microscope and high vacuum technology, used in scanning probe microscopy, discharge tubes, instruments, etc., can solve problems such as inability to achieve sample testing, achieve convenient maintenance and replacement, ensure independence, and reduce external noise. Effect

Pending Publication Date: 2021-10-01
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Usually due to the size of the sample stage, it is impossible to test samples under multi-scale conditions and under multiple conditions (optical, electrical, and magnetic environments), especially in an extremely low temperature environment less than 4.2K.

Method used

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  • Ultralow-temperature high-vacuum atomic force microscope system
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  • Ultralow-temperature high-vacuum atomic force microscope system

Examples

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Embodiment Construction

[0032] Such as Figure 1~7 As shown, an ultra-low temperature high vacuum atomic force microscope system includes an integrated fiber optic optical lever system 2, a Z-axis lifting platform 8, and a support with a built-in X-axis moving stage 12, a Y-axis moving stage 13, and a 15-micron scanner 7. seat.

[0033] A vacuum low-temperature linear motion motor 1 is provided between the support and the Z-axis lifting platform 8; a light lever support frame 6 is provided on one side of the Z-axis lifting platform 8, and a Z-axis vacuum low-temperature motor movement limiter 9 is provided on the other side , the bottom is connected with the support; the optical lever support frame 6 is connected with the integrated optical fiber optical lever system 2; the X-axis mobile platform 12 is provided with a Y-axis mobile platform 13, and the Y-axis mobile platform 13 is provided with a 15 micron scanner 7.

[0034]Wherein: the integrated optical fiber optic lever system 2 includes a mobi...

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Abstract

The invention relates to an ultralow-temperature high-vacuum atomic force microscope system. The system comprises an integrated optical fiber optical lever system, a Z-axis lifting platform and a support, wherein an X-axis moving table, a Y-axis moving table and a 15-micron scanner are arranged in the support. A vacuum low-temperature linear motion motor is arranged between the support and the Z-axis lifting platform; an optical lever supporting frame is arranged on one side of the Z-axis lifting platform, a Z-axis vacuum low-temperature motor moving limiting stopper is arranged on the other side of the Z-axis lifting platform, and the bottom of the Z-axis lifting platform is connected with the support; the optical lever support frame is connected with the integrated optical fiber optical lever system; and the Y-axis moving table is arranged on the X-axis moving table, and the 15-micron scanner is arranged on the Y-axis moving table. The system has the characteristics of low noise, large sample stage and multi-scale field combination.

Description

technical field [0001] The invention relates to the field of ultra-high vacuum and ultra-low temperature physical property measurement, in particular to an ultra-low temperature and high vacuum atomic force microscope system. Background technique [0002] With the continuous development of science and technology, people are more and more widely testing the morphology and various physical properties (such as friction force, adhesion force and elastic modulus) of materials under ultra-low temperature and ultra-high vacuum environment. At present, only small-volume scanning tunneling microscopes or recumbent small-volume atomic force microscopes are used to test surface topography under low temperature and high vacuum conditions. Morphology, while the small-volume horizontal atomic force microscope can only be tested in a 10K environment due to the design of the sample stage. Usually due to the size of the sample stage, it is impossible to test samples under multi-scale condit...

Claims

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Application Information

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IPC IPC(8): G01Q60/24H01J37/20H01J37/26
CPCG01Q60/24H01J37/20H01J37/261
Inventor 龚珍彬吴文超张俊彦周妍
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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