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Electrowetting liquid lens based on infiltration surface composite dielectric layer and manufacturing method

A surface composite, liquid lens technology, applied in optical components, instruments, optics, etc., can solve the problems of prolonging the clear image time interval, long response time of electrowetting lens, limited recoverability, etc., to eliminate contact line pinning effect, fully recoverable, fast imaging effect

Active Publication Date: 2021-10-12
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005]1) Due to the large contact angle hysteresis caused by the pinning effect of the contact line on the solid surface and the saturation of the contact angle under high voltage, it is necessary to achieve liquid contact in a large angle range Corner control remains challenging
Current electrowetting lenses based on solid dielectrics can only achieve shape control with a limited angular range and a limited number of adjustments, that is, limited restorability
[0006]2) When a voltage is applied, due to the instantaneous action of the external excitation electric field, the polar liquid inside the electrowetting lens based on solid dielectric will inevitably Oscillation phenomenon occurs, which prolongs the time interval between the beginning of voltage application and the lens showing a clear image, resulting in an excessively long response time of the electrowetting lens

Method used

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  • Electrowetting liquid lens based on infiltration surface composite dielectric layer and manufacturing method
  • Electrowetting liquid lens based on infiltration surface composite dielectric layer and manufacturing method
  • Electrowetting liquid lens based on infiltration surface composite dielectric layer and manufacturing method

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Embodiment 1

[0035] figure 1 A schematic cross-sectional view of an electrowetting liquid lens based on a wetting surface composite dielectric layer is shown, including a bottom substrate 104, a left side substrate 102 and a right side substrate 103 standing on both sides of the bottom substrate 104, and a top substrate 101 , the first bottom electrode 202 and the second bottom electrode 204 which partially occupy the upper surface of the bottom substrate 104 are arranged on the bottom substrate 104, and the left side electrode 201 is arranged on the left side substrate 102, correspondingly, on the right side The substrate 103 is provided with a right side electrode 203, and the left side electrode 201 and the right side electrode 203 are respectively covered with a wetting surface composite dielectric layer 401 (402).

[0036] The matrix in this embodiment also has other side matrixes, the bottom matrix 104, the left side matrix 102, the right side matrix 103, the top layer matrix 101 and...

Embodiment 2

[0061] A method for fabricating an electrowetting liquid lens based on wetting a composite dielectric layer on the surface, capable of fabricating the electrowetting liquid lens in Example 1, parameters Figure 4 and combine figure 1 -3, including:

[0062] Step S10, providing the underlying substrate 104;

[0063] Step S11, forming a first bottom electrode 202 and a second bottom electrode 204 on the bottom substrate 104;

[0064] Step S20, providing symmetrical left side matrix 102 and right side matrix 103;

[0065] Step S21, forming the left side electrode 201 on the left side substrate 102, and forming the right side electrode 203 on the right side substrate 103;

[0066] Step S22, forming a wetting surface composite dielectric layer on the left side electrode 201 and the right side electrode 203, wherein the formation process of the wetting surface composite dielectric layer is as follows:

[0067] 1) forming a porous material layer 301 on the surface of the side ele...

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Abstract

The invention provides an electrowetting liquid lens based on an infiltration surface composite dielectric layer and a manufacturing method. The electrowetting liquid lens comprises a substrate with a cavity, polar liquid and non-polar liquid, the polar liquid and the non-polar liquid are contained in the cavity and can form an interface in the cavity, a conductive layer is arranged on the substrate, after the conductive layer is electrified, voltage can be applied to the polar liquid to change the shape of the interface, the inner wall of the substrate is covered with an infiltration surface composite dielectric layer in direct contact with the polar liquid, and the infiltration surface composite dielectric layer comprises a porous insulating layer and a super-smooth liquid film layer formed on the surface of the porous insulating layer; the porous insulating layer covers the electrode and can absorb the ultra-smooth liquid. The lens has the advantages of being high in reaction speed and high in recoverability.

Description

technical field [0001] The invention relates to the field of lens technology, in particular to an electrowetting liquid lens based on a wetting surface composite dielectric layer and a manufacturing method of the electrowetting liquid lens based on wetting a surface composite dielectric layer. Background technique [0002] Electrowetting (Electrowetting, EW) refers to the phenomenon of changing the wettability of the droplet on the substrate by changing the voltage between the droplet and the insulating substrate, that is, changing the contact angle, so that the droplet is deformed and displaced. Electrowetting technology has begun to be widely used as a driving mechanism for various fluidic and electro-optic devices. The liquid lens using the electrowetting phenomenon, like the human eye, can automatically adapt to the object it is aiming at without the assistance of a mechanical device. It only needs to change the voltage of the two poles to modify the shape of the liquid ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00
CPCG02B26/005
Inventor 郝崇磊吴子健王兆一李兵
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL