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Vacuum pump and vacuum pump constituent component

A technology for structural parts and vacuum pumps, which is applied to pump elements, pumps, and parts of pumping devices for elastic fluids, etc. big effect

Pending Publication Date: 2021-10-15
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, due to temperature control using heaters and cooling pipes, the number of parts increases, and the cost required for processing, management, and assembly of parts also increases.

Method used

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  • Vacuum pump and vacuum pump constituent component
  • Vacuum pump and vacuum pump constituent component
  • Vacuum pump and vacuum pump constituent component

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0017] Hereinafter, vacuum pumps according to various embodiments of the present invention will be described based on the drawings. figure 1 A turbomolecular pump 10 as a vacuum pump according to the first embodiment of the present invention is schematically shown in longitudinal section. The turbomolecular pump 10 is connected to a vacuum chamber (not shown) of target equipment such as a semiconductor manufacturing device, an electron microscope, and a mass spectrometer, for example.

[0018] The turbomolecular pump 10 integrally includes a cylindrical pump body 11 and a box-shaped electrical box (not shown). The pump body 11 among them is, figure 1 The upper side is the suction part 12 connected to one side of the target equipment, and the lower side is the exhaust part 13 connected to the auxiliary pump and the like.

[0019] And, turbomolecular pump 10 in addition to figure 1 The vertical posture in the vertical direction as shown in , can also be used in an inverted po...

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PUM

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Abstract

[Problem] To provide a vacuum pump having a large thermal resistance between a heater and a cooling water pipe, and having a small number of components. [Solution] A vacuum pump provided with a casing main body 14 having an intake part 12 and an exhaust part 13 for a gas, a turbomolecular pump mechanism part 17 in which stator blades 19 and rotor blades 20 are formed, and a motor 16 for causing the rotor blades 20 to rotate, wherein the casing main body 14 has a base spacer 42 capable of conducting heat between an integrally formed heating spacer section 46 and cooling spacer section 47, and the base spacer 42 is provided with a boundary section 52 formed such that the cross section has a narrow neck shape between the heating spacer section 46 and the cooling spacer section 47.

Description

technical field [0001] The present invention relates to vacuum pumps such as turbomolecular pumps and components thereof, for example. Background technique [0002] Generally, a turbomolecular pump is known as one type of vacuum pump. In this turbomolecular pump, the rotor blades are rotated by energizing the motor inside the pump body, and the gas is discharged by bouncing gas molecules of the gas (process gas) sucked into the pump body. In addition, among such turbomolecular pumps, there are turbomolecular pumps of the type provided with heaters and cooling pipes in order to appropriately control the temperature of each part in the pump. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2015-031153. [0004] However, the above-mentioned heater and cooling pipe of the turbomolecular pump are components for realizing the opposite functions of heating and cooling, so the positional relationship and the design of peripheral parts must be carefully performed. For exa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D19/04F04D29/52F04D29/58
CPCF04D19/042F04D29/584F04D19/04F04D29/52F04D29/58
Inventor 吉原菜穗子坂口祐幸馆野泰小川洋平
Owner EDWARDS JAPAN