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Device for detecting length and inclination of silicon single crystal rod and detection method thereof

A single crystal silicon rod and slope technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problem of low detection accuracy and achieve the effect of improving accuracy and reducing friction

Active Publication Date: 2021-10-22
邳州千润模具有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of low detection accuracy in the prior art, and propose a device for detecting the length and inclination of a single crystal silicon rod and its detection method

Method used

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  • Device for detecting length and inclination of silicon single crystal rod and detection method thereof
  • Device for detecting length and inclination of silicon single crystal rod and detection method thereof
  • Device for detecting length and inclination of silicon single crystal rod and detection method thereof

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Experimental program
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Effect test

Embodiment 1

[0034] Embodiment one: refer to Figure 1-Figure 7, a device for detecting the length and inclination of a single crystal silicon rod, including a base 1, and also includes: a first mounting plate 103 slidably connected to the base 1; a second mounting plate fixedly connected to the side wall of the first mounting plate 103 4. The second mounting plate 4 is provided with a second chute 401; the sleeve 5 slidably connected to the second chute 401 through the mounting seat 502; the sliding rod 501 slidably connected to the sleeve 5; fixedly connected to the sliding The installation box 9 at the output end of the rod 501; the installation cylinder 6 connected to the installation box 9 by rotation, the installation cylinder 6 is rotatably connected with a rotating shaft 601, and there are four rotating shafts 601, and the four rotating shafts 601 are distributed in the installation cylinder 6 in a circumferential manner , the four rotating shafts 601 are fixedly connected with gea...

Embodiment 2

[0036] Embodiment two: refer to figure 1 , Figure 4 , a device for detecting the length and inclination of a single crystal silicon rod, which is basically the same as the first embodiment, furthermore, the driving part includes a second motor 605, and the second motor 605 is fixedly connected in the installation cylinder 6, and the second motor The driving end of 605 is fixedly connected with the first drive shaft 6051, and the first drive shaft 6051 is connected with the four rotating shafts 601 through the sprocket transmission group 604. The installation box 9 is fixedly connected with the third motor 901, and the output of the third motor 901 end is fixedly connected with a second drive shaft 902, the second drive shaft 902 is fixedly connected with the installation cylinder 6, the base 1 is fixedly connected with a first motor 101, the output end of the first motor 101 is fixedly connected with a screw rod 102, the first installation A threaded hole corresponding to th...

Embodiment 3

[0038] Embodiment three, refer to figure 1 , a device for detecting the length and inclination of a single crystal silicon rod, which is basically the same as the first embodiment, furthermore, a first sliding groove 105 is provided in the base 1, and a slider 104 is fixedly connected to the first mounting plate 103 , the sliding block 104 is slidably connected in the first sliding groove 105 .

[0039] By making the slider 104 slide in the first chute 105, the first chute 105 and the slider 104 are used to increase the stability of the first mounting plate 103, preventing it from jolting in the process of moving, and avoiding the center rod 801 from colliding with the first chute. The center of the single crystal silicon rod is misaligned and the exact value cannot be obtained.

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Abstract

The invention discloses a device for detecting the length and inclination of a silicon single crystal rod and a detection method thereof, and belongs to the technical field of silicon single crystal rod detection. A device for detecting the length and the inclination of a silicon single crystal rod comprises a base and further comprises: a first mounting plate which is slidingly connected to the base; and a second mounting plate which is fixedly connected to the side wall of the first mounting plate; the silicon single crystal rod is clamped through the four mounting rods, the axis of the center rods and the axis of the silicon single crystal rod are located on the same straight line, the two center rods abut against the center points of the end faces of the two ends of the silicon single crystal rod, the length of the silicon single crystal rod is rapidly and accurately measured, then the mounting cylinder is rotated, the measuring rod is rotated, the end face of the silicon single crystal rod is integrally measured, multiple groups of data are rapidly measured, the maximum value is taken out, and the maximum value is used for subtracting the initial angle between the end point of the measuring rod and the center rod to obtain an accurate inclination value, so that the measurement precision is improved.

Description

technical field [0001] The invention relates to the technical field of single crystal silicon rod detection, in particular to a device for detecting the length and slope of a single crystal silicon rod and a detection method thereof. Background technique [0002] At present, with the rapid development of the solar photovoltaic industry, the demand for monocrystalline silicon rods as the main raw material has increased significantly. The slope is measured to calculate the effective length that can be cut into silicon wafers. [0003] When measuring single crystal silicon, because the cutting surface of the crystal silicon rod has a certain slope, the existing measuring device is not aligned with the axis of the silicon crystal rod during measurement, resulting in inaccurate data of the measured slope and measured length , resulting in an error in the calculation of the effective length that can be cut into silicon wafers, so it is necessary to design a device and a detection...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B11/26
CPCG01B11/02G01B11/26
Inventor 朱焕焕万文义
Owner 邳州千润模具有限公司