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Micro-focus X-ray source packaging structure

A packaging structure and X-ray technology, applied in X-ray equipment, electrical components, etc., can solve the problems of poor heat dissipation and poor insulation performance of X-ray tubes, and achieve the effect of maintaining long-term stable work and good insulation performance

Pending Publication Date: 2021-10-22
WUXI UNICOMP TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a micro-focus X-ray source packaging structure to solve the problems of poor heat dissipation and poor insulation performance of the X-ray tube after the micro-focus X-ray source is packaged in the prior art

Method used

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  • Micro-focus X-ray source packaging structure

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Embodiment Construction

[0013] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0014] see figure 1 , the present invention provides a technical solution: a micro-focus X-ray source packaging structure, including an epoxy module 1, a metal sealing plate 2 and an inflatable air bag 3, and one end of the epoxy module 1 is provided with a first cavity 11 and a second Two chambers 12, the metal sealing plate 2 is provided with holes matching the first cavity 11 and the second cavity 12, the metal sealing plate 2 is press-fitted on the end of ...

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Abstract

The invention relates to the technical field of X-ray tubes, in particular to a micro-focus X-ray source packaging structure which comprises an epoxy module, a metal sealing plate and an expansion and contraction air bag, one end of the epoxy module is provided with a first cavity and a second cavity, the metal sealing plate is provided with holes matched with a first cavity opening and a second cavity opening, the metal sealing plate is pressed at the end of the epoxy module in a sealed mode, the X-ray tube penetrates through the metal sealing plate, enters the first cavity and is connected with the metal sealing plate in a sealed mode, the expansion air bag penetrates through the metal sealing plate, enters the second cavity and is connected with the metal sealing plate in a sealed mode, and a groove is formed in the side, facing the epoxy module, of the metal sealing plate. The first cavity and the second cavity are communicated through the groove, the first cavity and the second cavity are filled with insulating oil, and according to the invention, the problems that in the prior art, after a microfocus X-ray source is packaged, an X-ray tube is poor in heat dissipation performance and poor in insulating performance can be solved.

Description

technical field [0001] The invention relates to the technical field of micro-focus X-ray tubes, and specifically relates to a micro-focus X-ray source packaging structure. Background technique [0002] The micro-focus X-ray source has the characteristics of small size and easy to use and install, so the micro-focus X-ray source is widely used in electronic semiconductor technology. The core component of the ray source is the ray tube, and the packaging of the ray tube is a difficult point in the manufacture and processing of the ray source. According to the principle of X-ray generation, the most important problem is the heat dissipation and insulation performance of the ray tube. [0003] The packaged X-ray tube of the existing micro-focus X-ray source has poor heat dissipation performance and poor insulation performance, which seriously affects the service life of the micro-focus X-ray source. Contents of the invention [0004] The object of the present invention is to ...

Claims

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Application Information

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IPC IPC(8): H05G1/04
CPCH05G1/04
Inventor 张伟刘骏王刘成仇小军
Owner WUXI UNICOMP TECH
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