Flexible electrostatic chuck

Abstract

The invention discloses a flexible electrostatic chuck. The flexible electrostatic chuck comprises a soft suction cup, a supporting structure and an electrostatic adsorption film, the edge of the soft suction cup is fixedly connected with the edge of the electrostatic adsorption film, a hollow area is formed between the soft suction cup and the electrostatic adsorption film, the bottom of the supporting structure is fixedly connected to the hollow area between the soft suction cup and the electrostatic adsorption film, and the top of the supporting structure is connected with external equipment. And the electrostatic adsorption film is electrically connected with an external high-voltage generator through a relay. An electrostatic adsorption principle is adopted, noise is low, and compared with adsorption with high noise such as negative pressure or positive pressure adsorption, the suction cup can be suitable for more working scenes with noise control requirements, can adapt to wall faces of various scenes and various materials, can also adapt to adsorption of curved wall faces, and can provide stable working conditions for external equipment. The suction cup disclosed by the invention has better adaptability and wider application range.

Description

technical field [0001] The invention belongs to a sucker in the field of innovative design of electromechanical coupling, in particular to a flexible electrostatic sucker. Background technique [0002] As an important component in petrochemical, electric power, construction and other fields, pipelines play an important role, but they are prone to safety problems such as cracking, corrosion, and embrittlement during use. Therefore, regular and timely maintenance of pipeline equipment can effectively avoid hidden dangers , and pipeline adsorption technology is one of the key technologies for pipeline inspection and maintenance operations, and is widely used in the maintenance of industrial pipelines such as GIS high-voltage transmission pipelines. Traditional pipeline adsorption technologies are mostly based on air pressure or ferromagnetic adsorption. These technologies have problems such as poor reliability, high noise, and high requirements for adsorption wall materials. ...

AI Technical Summary

Problems solved by technology

[0004] For ferromagnetic adsorption technology, it requires the pipeline to be made of magnetic materials, which has poor adaptability. For negative pressure adsorption technology, it requires a large negative pressure, which requires a large volume and high noise. For positive pressure adsorption technology, it is reliable. Poor performance, poor adaptability to complex environments, clamping adsorption and bionic adsorption have certain requirements on the wall surface, poor adaptability

[0005] At the same time, with the development of robot technology, the load requirements for adsorption technology are gradually relaxed, but the scope of application of adsorption technology is gradually increased. Existing adsorption technologies can usually withstand larger loads, but they can adapt to fewer environments. It is not conducive to the development and application of pipeline operation robots

[0006] To sum up, the existing pipeline adsorption technology has a complex structure, but has different requirements for the working environment, and cannot adapt to the current working scene of the non-magnetic pipeline inner surface that is commonly used, and cannot well meet the needs of pipeline wall-climbing robots.

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