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Resistive humidity sensor and method for manufacturing resistive humidity sensor

A technology of humidity sensor and manufacturing method, which is applied in the direction of instruments, scientific instruments, and material analysis through electromagnetic means, and can solve the problems of burning out the resistive humidity sensor and being unable to use the resistive humidity sensor, etc.

Pending Publication Date: 2021-10-29
HOKURIKU ELECTRIC INDS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] When the user of the resistive humidity sensor uses it without being aware of the rated current, a current higher than the rated current flows, causing the problem that the resistive humidity sensor cannot be used within the correct operating range.
In addition, the user mistakenly causes an overcurrent exceeding the allowable current to flow through the resistive humidity sensor and burns out the resistive humidity sensor.

Method used

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  • Resistive humidity sensor and method for manufacturing resistive humidity sensor
  • Resistive humidity sensor and method for manufacturing resistive humidity sensor
  • Resistive humidity sensor and method for manufacturing resistive humidity sensor

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Embodiment Construction

[0029] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1(A) is a diagram in which the cap terminals 7 and 7 are shown as transparent in the middle of the manufacturing process of the resistive humidity sensor 1 of this embodiment, and FIG. The figure after soldering the leads 9 and 9 on both sides and implementing the moisture-sensitive film 13 , the protective film 15 and the resin coating layer 19 . FIG. 1(C) is a schematic diagram showing the structure of the moisture-sensitive film forming portion of the resistive humidity sensor 1 according to the present embodiment. The resistive humidity sensor 1 in an intermediate state shown in FIG. The resistor film 5 is formed of a resistor material such as ruthenium oxide that does not migrate. A pair of metal cap-shaped terminals 7 , 7 are fitted to both ends of the cylindrical insulating base 3 so as to be in contact with the resistive film 5 . The pair of cap ...

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Abstract

The present invention provides a resistive humidity sensor which does not require an external member for characteristic adjustment, and a method for manufacturing the resistive humidity sensor. The resistive humidity sensor is provided with a cylindrical insulating base (3); a pair of cap-shaped terminals (7, 7) fitted and fixed to both ends of the cylindrical insulating base (3); a resistive film (5) formed on the surface of the cylindrical insulating base (3) and electrically connected to the pair of cap-shaped terminals (7, 7); a slit (11) formed in the resistive film (5) in order to divide the resistive film (5) into two; and a humidity sensing film (13), the resistance value of which changes according to the change of the humidity.

Description

technical field [0001] The invention relates to a resistive humidity sensor and a manufacturing method of the resistive humidity sensor. Background technique [0002] In the second figure of Japanese Patent Application Laid-Open No. 54-70096 (Patent Document 1), a resistive humidity sensor is disclosed, which covers two ends of the surface of the hollow cylindrical substrate 1 from above. The moisture-sensing film 3 is covered on the electrodes 2 by means of gaps between the electrodes 2 , and the resistance value of the moisture-sensing film 3 between the gaps is measured by using two electrode lead-out wires 4 . [0003] In addition, in Japanese Patent Application Laid-Open No. 4-364456 (Patent Document 2) figure 2 , discloses a moisture-sensitive element 1 formed in a substantially columnar or substantially cylindrical shape, two conductor layers 2 disposed on the surface of the moisture-sensitive element 1 with a gap 3 interposed therebetween, and a moisture-sensitive e...

Claims

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Application Information

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IPC IPC(8): G01N27/04
CPCG01N27/048
Inventor 数井雅之今村彻治砂原忠男松原幸辅西田达也
Owner HOKURIKU ELECTRIC INDS
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