Mixing device for preparing high-purity tungsten powder for large-scale integrated circuit
A technology of large-scale integrated circuits and mixing devices, applied in mixers, shaking/oscillating/vibrating mixers, dissolving, etc., can solve the problems of low purity of tungsten powder and low mixing efficiency, so as to improve mixing efficiency and ensure Mixing effect, efficiency-enhancing effect
Active Publication Date: 2021-11-02
PERIC SPECIAL GASES CO LTD
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Problems solved by technology
[0004]
The current high-purity tungsten needs to be pre-mixed and stirred before subsequent processing during the preparation, but the mixing efficiency of the existing preparation mechanism is low during pre-mixing, which seriously affects the subsequent processing, resulting in the production of tungsten powder. The purity is not high The problem
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Embodiment 1
[0031] The mixing device for the preparation of high-purity tungsten powder for large-scale integrated circuits in this embodiment, such as Figure 1-5 As shown, the device includes a bearing platform 10, a vertical rod 16 is fixed on one side of the upper surface of the bearing platform 10, and the upper end of the vertical rod 16 is rotatably connected to one end of the lower surface of the mixing box 5; Cavity, a hydraulic cylinder 17 is installed in the cavity, a moving plate 22 is fixed at the end of the piston rod of the hydraulic cylinder 17, and the two ends of the upper surface of the moving plate 22 are rotatably connected with a slanting rod 8, two slanting rods The upper ends of 8 are all rotatably connected to the lower surface of the mixing box 5, and are away from the vertical bar 16; a first stirring mechanism is installed on the outer wall of one side of the mixing box 5, and a second stirring mechanism is arranged above the mixing box 5. In this embodiment, t...
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Abstract
The invention provides a mixing device for preparing high-purity tungsten powder for a large-scale integrated circuit, the mixing device comprises a bearing table, a vertical rod is fixed on one side of the upper surface of the bearing table, and the upper end of the vertical rod is rotatably connected with one end of the lower surface of a mixing box; a cavity is formed in the bearing table, a hydraulic cylinder is mounted in the cavity, a moving plate is fixed to the tail end of a piston rod of the hydraulic cylinder, inclined rods are rotationally connected to the two ends of the upper surface of the moving plate, and the upper ends of the two inclined rods are rotationally connected to the lower surface of the mixing box and are far away from the vertical rod; a first stirring mechanism is mounted on the outer wall of one side of the mixing box, and a second stirring mechanism is arranged above the mixing box. The mixing effect of the raw materials is guaranteed through the first stirring mechanism and the second stirring mechanism, the preparation efficiency of the high-purity tungsten powder can be effectively improved, and sufficient conditions are provided for subsequent processing.
Description
technical field [0001] The invention belongs to the technical field of high-purity tungsten powder preparation devices, and in particular relates to a mixing device for preparing high-purity tungsten powder for large-scale integrated circuits. Background technique [0002] High-purity tungsten and its silicides are used in ultra-large-scale integrated circuits as resistance layers, diffusion barriers, etc., and as gate materials and connection materials in metal oxide semiconductor transistors. [0003] The improvement of the integration level of large-scale integrated circuits in microelectronics technology has put forward higher requirements for materials, and traditional Si-based devices are no longer applicable. High-purity tungsten or ultra-pure tungsten (5N or 6N) is widely used as gate electrode material, wiring material and shielding metal material for semiconductor large-scale integrated circuits due to its high electron migration resistance, high temperature stabil...
Claims
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IPC IPC(8): B01F11/00B01F15/00B22F9/22
CPCB22F9/22Y02P10/20
Inventor 林坤王少波王亚峰马朝选
Owner PERIC SPECIAL GASES CO LTD