Unlock instant, AI-driven research and patent intelligence for your innovation.

Single-pole multi-throw RF MEMS switch based on TGV technology and wafer level packaging method

A single-pole, multiple-throw, switch technology, applied in the direction of microstructure technology, technology for producing decorative surface effects, decorative art, etc., can solve the problems of inflexible control, single application, simple structure, etc., and achieve high process realization, The effect of simple process and small size

Inactive Publication Date: 2021-11-02
南京鹳巢传感技术有限公司
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The radio frequency switch is the basic structural unit of the communication equipment, which plays an important role in the communication system. The RF MEMS switch is a kind of radio frequency switch made by using MEMS technology. By controlling the movement of the micromechanical structure, the purpose of controlling the on and off of the signal is achieved. , compared with traditional RF semiconductor switches, RF MEMS switches have the advantages of low insertion loss, high isolation, high linearity and long service life. and single application

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Single-pole multi-throw RF MEMS switch based on TGV technology and wafer level packaging method
  • Single-pole multi-throw RF MEMS switch based on TGV technology and wafer level packaging method
  • Single-pole multi-throw RF MEMS switch based on TGV technology and wafer level packaging method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038]The specific implementation manners of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0039] The present invention designs a single-pole multi-throw RF MEMS switch based on TGV technology. In practical applications, such as Figure 1 to Figure 5 As shown, the specific design includes a substrate 1, a total signal line 2, a signal input terminal 3, an upper ground member 4, a lower ground member 5, and at least one RF MEMS switch; wherein, the total signal line 2 is arranged on the substrate 1 On the surface, the signal input terminal 3 is arranged on the lower surface of the substrate 1 , and the total signal line 2 is electrically connected to the signal input terminal 3 .

[0040] The structures of each RF MEMS switch are identical to each other, and each RF MEMS switch includes an anchor point 6, a cantilever beam 7, a branch signal line 8, a lower driving electrode 9, a signal output terminal 10, and t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a single-pole multi-throw RF MEMS switch based on a TGV technology, which is characterized in that on the basis of a substrate (1), signal input is realized by applying electrical connection between a signal input end (3) and a main signal line (2), and then the RF MEMS switches respectively butted with the main signal line (2) drive corresponding cantilever beams (7) to move based on anchor points (6) in cooperation with charge accumulation on a driving electrode (9), output of branch control signals corresponding to the RF MEMS switches is achieved, and single-pole multi-throw control is achieved. The whole design structure has extremely low insertion loss and extremely high isolation, and is based on the TGV technology, free of routing, simpler in packaging, smaller in size and higher in yield; correspondingly, a wafer level packaging method is also designed for the switch, and is matched with a substrate TGV through hole technology for use, so that higher reliability is obtained, the process is simple, the cost is low, and the smethod is suitable for various substrates.

Description

technical field [0001] The invention relates to a single-pole multi-throw RF MEMS switch based on TGV technology and a wafer-level packaging method, belonging to the technical field of contact micro-electromechanical switches. Background technique [0002] The radio frequency switch is the basic structural unit of the communication equipment, which plays an important role in the communication system. The RF MEMS switch is a kind of radio frequency switch made by using MEMS technology. By controlling the movement of the micromechanical structure, the purpose of controlling the on and off of the signal is achieved. , compared with traditional RF semiconductor switches, RF MEMS switches have the advantages of low insertion loss, high isolation, high linearity and long service life. And the application is single. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a single-pole multi-throw RF MEMS switch based on TGV te...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01P1/12H01P1/15H01P11/00B81B7/02B81B7/00B81C1/00
Inventor 马清杰王竞轩
Owner 南京鹳巢传感技术有限公司
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com