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Semiconductor test pattern and test method thereof

A technology of test pattern and test method, applied in semiconductor/solid-state device test/measurement, semiconductor device, measurement device, etc., can solve problems such as affecting resistance value, affecting the quality of electronic products, and inconsistent sound volume of headphones

Active Publication Date: 2021-11-05
UNITED SEMICONDUCTOR (XIAMEN) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] However, even if the paired resistors have the same or symmetrical patterns, among the many steps in the semiconductor manufacturing process, some steps may affect the resistance value of the resistors, resulting in unequal resistance values ​​on both sides of the paired resistors, and affecting subsequent The quality of the resulting electronic product (for example, causing the sound level of the left and right sides of the earphone to be inconsistent)

Method used

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  • Semiconductor test pattern and test method thereof
  • Semiconductor test pattern and test method thereof
  • Semiconductor test pattern and test method thereof

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Embodiment Construction

[0023] In order to enable those who are familiar with the technical field of the present invention to further understand the present invention, the preferred embodiments of the present invention are enumerated below, together with the accompanying drawings, the constitutional content and desired effects of the present invention are described in detail. .

[0024] For the convenience of description, the drawings of the present invention are only schematic diagrams for easier understanding of the present invention, and the detailed proportions thereof can be adjusted according to design requirements. Those skilled in the art should be able to understand the upper and lower relationships of relative elements in the figures described in the text to refer to the relative positions of objects, so they can be turned over to present the same components, which should all be disclosed in this specification The range is described here.

[0025] One of the objectives of the present inven...

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Abstract

The invention discloses a semiconductor test pattern and a test method thereof, and the semiconductor test pattern comprises a high-density element area and a plurality of resistor pairs surrounding the high-density element area, wherein each resistor pair comprises two mutually symmetrical resistor patterns.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing technology, in particular to a semiconductor test pattern including a plurality of resistance pairs (pairresistor). Background technique [0002] In the field of semiconductor manufacturing technology, resistors are common electronic components. In some practical applications, resistors are made in pairs to be used in electronic products that are also in pairs, such as earphones and the like. [0003] However, even if the paired resistors have the same or symmetrical patterns, among the many steps in the semiconductor manufacturing process, some steps may affect the resistance value of the resistors, resulting in unequal resistance values ​​on both sides of the paired resistors, and affecting subsequent The quality of the resulting electronic product (for example, causing the sound level of the left and right sides of the earphone to be inconsistent). Contents of the invention [000...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66
CPCH01L22/14H01L22/30H01L22/34H01L21/268G01R27/02H01L27/0611G01R27/14G01R17/105G01R31/2831G01R31/2858G01R27/2635
Inventor 袁林山杨光欧阳锦坚吕嘉伟黄清俊谈文毅
Owner UNITED SEMICONDUCTOR (XIAMEN) CO LTD
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