Device and method for automatically identifying wafer iron gridiron and reading ID

Abstract

The invention provides a device and method for automatically identifying a wafer iron gridiron and reading an ID, the device comprises an automatic code scanning device and a sorting machine upper computer system, the automatic code scanning device is arranged on a wafer loading and unloading machine and used for reading the ID of the wafer iron gridiron arranged on a wafer loading and unloading machine panel and sending the ID to the sorting machine upper computer system, the upper computer system of the sorting machine automatically identifies whether the iron gridiron is placed on the current wafer loading and unloading machine according to the ID information sent by the automatic code scanning device, judges the size of the current iron gridiron and reports the ID information of the iron gridiron, so that the purpose of wafer tracking is achieved. The problem of automatic identification of the iron gridiron in a semiconductor customer factory is solved, automation is realized on the basis of the original process which cannot be used for automation, the labor cost of customers is reduced, the wafer breakage rate caused by human errors is reduced, and the compatibility of automatic wafer boat identification of the wafer loading and unloading machine is improved.

Description

technical field [0001] The invention relates to a device and method for automatically identifying a wafer iron grill and reading an ID. Background technique [0002] In the field of semiconductors, there is a process in the wafer manufacturing process that requires transferring the wafers in conventional wafer boats (such as FOUP, FOSB, etc.) to special wafer boats (iron grills), and then putting them in an oven for heating and baking . Since the iron grill is not a wafer carrier that fully complies with the semiconductor SEMI standard, and is used in a high-temperature environment, it does not have RFID tags or strip stickers and other components for identification. Therefore, for semiconductor factories with a high degree of automation, the iron grill The realization of automatic identification and ID reading is particularly important. [0003] At present, there are already some mature solutions for LoadPort’s automatic identification and ID reading methods for wafer boa...

AI Technical Summary

Problems solved by technology

[0013] The technical problem to be solved by the present invention is: the existing wafer boat automatic identification and ID reading equipment cannot automatically identify and automatically read the ID of the special magazine on the wafer loading and unloading machine

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