Device and method for automatically identifying wafer iron gridiron and reading ID

An automatic identification, wafer technology, applied in the direction of electromagnetic radiation induction, instruments, induction record carriers, etc., can solve the problems of automatic identification of special material boxes and automatic ID reading, etc., to reduce the fragmentation rate, increase compatibility, reduce The effect of human cost

Pending Publication Date: 2021-11-12
华芯(嘉兴)智能装备有限公司
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  • Abstract
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  • Application Information

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Problems solved by technology

[0013] The technical problem to be solved by the present invention is: the existing wafer boat automatic identification and ID reading

Method used

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  • Device and method for automatically identifying wafer iron gridiron and reading ID
  • Device and method for automatically identifying wafer iron gridiron and reading ID
  • Device and method for automatically identifying wafer iron gridiron and reading ID

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Embodiment Construction

[0040] In order to make the present invention more comprehensible, preferred embodiments are described in detail below with accompanying drawings.

[0041] Such as figure 1 and figure 2 As shown, the present invention is used on a sorting machine where wafers in wafer boats such as FOUP are transferred to iron grills. It is a process before wafers enter the oven to start heating and baking. The wafer boat in front of the grill) is generally a standard wafer boat such as FOUP. Such as figure 1 As shown, a device for automatically identifying wafer iron grills and ID reading in the present invention includes an automatic code scanning device and a sorting machine host computer system. The automatic code scanning device is installed on the frame of the wafer loading and unloading machine 10, and the wafer The iron grill 11 is installed on the panel of the wafer handling machine 10 .

[0042] The automatic code scanning device includes a fixed code scanner 3, an installation ...

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Abstract

The invention provides a device and method for automatically identifying a wafer iron gridiron and reading an ID, the device comprises an automatic code scanning device and a sorting machine upper computer system, the automatic code scanning device is arranged on a wafer loading and unloading machine and used for reading the ID of the wafer iron gridiron arranged on a wafer loading and unloading machine panel and sending the ID to the sorting machine upper computer system, the upper computer system of the sorting machine automatically identifies whether the iron gridiron is placed on the current wafer loading and unloading machine according to the ID information sent by the automatic code scanning device, judges the size of the current iron gridiron and reports the ID information of the iron gridiron, so that the purpose of wafer tracking is achieved. The problem of automatic identification of the iron gridiron in a semiconductor customer factory is solved, automation is realized on the basis of the original process which cannot be used for automation, the labor cost of customers is reduced, the wafer breakage rate caused by human errors is reduced, and the compatibility of automatic wafer boat identification of the wafer loading and unloading machine is improved.

Description

technical field [0001] The invention relates to a device and method for automatically identifying a wafer iron grill and reading an ID. Background technique [0002] In the field of semiconductors, there is a process in the wafer manufacturing process that requires transferring the wafers in conventional wafer boats (such as FOUP, FOSB, etc.) to special wafer boats (iron grills), and then putting them in an oven for heating and baking . Since the iron grill is not a wafer carrier that fully complies with the semiconductor SEMI standard, and is used in a high-temperature environment, it does not have RFID tags or strip stickers and other components for identification. Therefore, for semiconductor factories with a high degree of automation, the iron grill The realization of automatic identification and ID reading is particularly important. [0003] At present, there are already some mature solutions for LoadPort’s automatic identification and ID reading methods for wafer boa...

Claims

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Application Information

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IPC IPC(8): G06K7/10H01L21/67
CPCG06K7/10435G06K7/10861H01L21/67294
Inventor 龚昱刘红军邓雯沈佳莉
Owner 华芯(嘉兴)智能装备有限公司
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