Flow rate ratio control system, film forming system, abnormality diagnosis method, and abnormality diagnosis program medium
A technology of proportional control and abnormal diagnosis, applied in the direction of flow control, control/regulation system, flow control using electrical devices, etc.
Pending Publication Date: 2021-11-16
HORIBA STEC CO LTD
View PDF1 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0005] However, even if it is diagnosed as no leakage through this detection, if there is an abnormality such as clogging in the flow sensor, the flow rate flowing through the split channel will not reach the specified split ratio. Abnormal, still can not get the specified split ratio
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0041] Hereinafter, an embodiment of the flow proportional control system of the present invention will be described with reference to the drawings.
[0042] The flow ratio control system 100 of this embodiment is used in semiconductor processes, such as figure 1 As shown, it is used to supply fluid at a desired flow rate ratio to a plurality of supply ports provided in the downstream film forming chamber C.
[0043] In addition, upstream of the flow rate proportional control system 100 is provided, for example, a plurality of mass flow controllers, and a gas panel GP for supplying fluid at a predetermined flow rate to the flow rate proportional control system is provided. Furthermore, the gas panel GP, the flow ratio control system 100 and the film forming chamber C constitute a film forming system 200 for forming a film on a substrate.
[0044] Specific as figure 1 As shown, the flow proportional control system 100 has: a plurality of shunt channels 1 arranged side by side...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A flow rate ratio control system, a film forming system, an abnormality diagnosis method, and an abnormality diagnosis program medium are provided by the invention. In a flow rate proportional control system that controls the flow rates of a plurality of split channels provided parallel to each other to a certain flow split ratio, in order to be able to diagnose whether a system abnormality that affects the split ratio has occurred, the flow rate ratio control system includes: a flow split ratio calculation unit (43) that calculates a ratio of output values of flow rate sensors (2) obtained by allowing, while fluid control valves (3) of different split channels (1) are closed, fluids to flow in these split channels as an actual flow split ratio; a reference flow split ratio storage unit (44) that stores a reference flow split ratio serving as a reference for the actual flow split ratio; and an abnormality diagnosis unit (45) that compares the actual flow split ratio and the reference flow split ratio, and diagnoses a system abnormality.
Description
technical field [0001] The present invention relates to a flow rate proportional control system, a film forming system, and an abnormality diagnosis method of the flow rate proportional control system and an abnormality diagnosis program medium used in, for example, semiconductor manufacturing processes and the like. Background technique [0002] Such a flow ratio control system includes a plurality of branch flow channels arranged in parallel to each other, and controls the ratio of the flow rates of fluids flowing into the respective flow flow channels to a predetermined flow ratio. [0003] More specifically, in the above-mentioned flow ratio control system, flow sensors and fluid control valves are provided in each of the split channels, and the fluid control valves are controlled so that the ratio of the output values of the respective flow sensors becomes a predetermined split ratio. [0004] In such a flow rate proportional control system, Patent Document 1 describe...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G05D7/06
CPCG05D7/0635G05D11/132G05D7/0664C23C16/52C23C16/45561G05D7/0629G01F1/68G01F15/06H01L21/67253G05D7/0652F16K37/005
Inventor 金丸雄介瀧尻兴太郎赤土和也
Owner HORIBA STEC CO LTD