The invention provides a substrate
processing apparatus capable of improving
solvent concentration in a shorter time. This substrate
processing apparatus (100) is provided with a
processing tank (Tk0), a substrate holding unit (10), a
discharge unit (4), and an
organic solvent recovery unit (5). The processing tank (Tk0) stores a liquid (L1). The substrate holding unit (10) holds a plurality of substrates (W) and immerses the plurality of substrates (W) in the liquid (L1) in the processing tank (Tk0). The
discharge unit (4) discharges a second-concentration liquid having a higher
solvent concentration than the first-concentration liquid from a treatment tank (Tk0) in which a liquid (L1) is stored in the treatment tank (Tk0), the liquid (L1) containing water and an
organic solvent having a lower
specific gravity than the water and having a higher
solvent concentration on the upper side than on the lower side, while avoiding at least a part of the first-concentration liquid in the liquid (L1). The
organic solvent recovery unit (5) includes a dehydrator that separates water from the second-concentration liquid discharged by the
discharge unit (4) and generates a third-concentration liquid having a higher solvent concentration than the second-concentration liquid.