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Ionization gauge sensitivity numerical calculation method based on electron trajectory integration method

A technology of electronic trajectory and numerical calculation, applied in CAD numerical modeling, design optimization/simulation, special data processing applications, etc., to achieve the effect of avoiding errors

Pending Publication Date: 2021-11-16
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology

[0007] Therefore, it is necessary to propose a convenient and feasible high-precision numerical calculation method to overcome the excessive calculation errors caused by complex programming and too many idealized boundary conditions in the ionization gauge calculation, and to facilitate the optimization analysis of the ionization gauge regulatory structure and electrical parameters.

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  • Ionization gauge sensitivity numerical calculation method based on electron trajectory integration method
  • Ionization gauge sensitivity numerical calculation method based on electron trajectory integration method
  • Ionization gauge sensitivity numerical calculation method based on electron trajectory integration method

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Embodiment Construction

[0022] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0023] The invention provides a numerical calculation method for the sensitivity of an ionization gauge based on an electron trajectory integration method, which specifically includes the following steps:

[0024] Obtain the structural parameters and electrical parameters of the electrodes of the ionization gauge to be calculated, and at the same time consider the wall size of the flange adapter, use CAD modeling tools (such as Proe, Solidworks, etc.) on the PC to establish the geometric model of the ionization gauge to be calculated, The geometric model is built and imported into the ion optics simulation software, and then the calculation program is compiled to calculate and analyze the electromagnetic field distribution and the motion characteristics of charged particles.

[0025] Such as figure 1 As shown, the sensitivity calculation process is as fol...

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Abstract

The invention discloses an ionization gauge sensitivity numerical calculation method based on an electron trajectory integration method. The numerical calculation method comprises the following steps: constructing a three-dimensional structure model of an ionization gauge, performing finite element division on the model by utilizing a finite element method, determining boundary conditions, calculating space electromagnetic field distribution of the model by solving a Poisson equation, then calculating an electron movement track and an ion movement track of the electromagnetic field space by using a fourth-order Runge-Kutta method, obtaining an effective ionization area according to the ion movement track and statistical analysis, thereby calculating an effective electron track distributed in the effective ionization area, finally dividing the effective electron track into a plurality of segments, calculating the length of each section and an ionization section corresponding to the length of each section, and performing integral calculation according to a sensitivity physical definition to obtain a sensitivity value. High-precision sensitivity numerical calculation of the ionization gauge can be realized.

Description

technical field [0001] The invention belongs to the technical field of vacuum measurement, and in particular relates to a numerical calculation method for the sensitivity of an ionization gauge based on an electron trajectory integration method. Background technique [0002] Sensitivity is one of the important performance indicators for ionization gauges to achieve accurate vacuum measurement. In the process of ionization gauge regulation research and analysis, sensitivity is usually analyzed by two methods, namely the experimental method and the numerical calculation method. The experimental method is intuitive and reliable, but The operation process is complicated and the cost is high; while the numerical calculation method has a series of characteristics such as convenient operation, easy theoretical optimization, and low cost, and has important application value for the regulation structure and electrical parameter optimization of new ionization gauges. [0003] For ioni...

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Application Information

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IPC IPC(8): G06F30/23G06F30/25G06F111/10
CPCG06F30/23G06F30/25G06F2111/10
Inventor 张虎忠成永军孙雯君魏建平贾文杰孙冬花吴成耀
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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