A method for controlling the tension force of the induction diaphragm after welding of a capacitive thin film vacuum gauge

A control method and sensing membrane technology, applied in vacuum gauges, measuring fluid pressure, instruments, etc., can solve problems such as high trial and error costs, low product qualification rate, and large randomness of diaphragm tension force, so as to improve product qualification High efficiency, precise control, process controllable effect

Active Publication Date: 2022-02-08
JIHUA LAB
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Problems solved by technology

[0004] In this way, it is necessary to adjust the welding process parameters many times to carry out multiple welding tests. The process of determining the welding process parameters is complicated, the cost of trial and error is high, and it is still difficult to effectively control and obtain a suitable tension force of the membrane. The randomness of sheet tension is large, and the product qualification rate is low

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  • A method for controlling the tension force of the induction diaphragm after welding of a capacitive thin film vacuum gauge
  • A method for controlling the tension force of the induction diaphragm after welding of a capacitive thin film vacuum gauge
  • A method for controlling the tension force of the induction diaphragm after welding of a capacitive thin film vacuum gauge

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[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all of them. The components of the embodiments of the application generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present application.

[0038] It should ...

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Abstract

This application belongs to the technical field of mechanical processing, and discloses a method for controlling the tension force after welding the induction diaphragm of a capacitive thin film vacuum gauge, comprising the following steps: welding the sensing diaphragm to the cylindrical cavity of the capacitive thin film vacuum gauge The lower end of the body; the yield strength of the material of the cavity is lower than that of the sensing diaphragm; the pressure is unloaded after the pressure is applied on the inner wall of the cavity, so that when the pressure is applied, the inner part of the cavity wall of the cavity and the cavity of the cavity The outer part of the wall and the sensing diaphragm are in the state of plastic deformation, elastic deformation and elastic tension respectively, so that the sensing diaphragm has the required tension after unloading the pressure; the sensing diaphragm of the capacitive thin film vacuum gauge The tension control method after sheet welding is beneficial to realize the precise control of the tension force after induction diaphragm welding.

Description

technical field [0001] The present application relates to the technical field of mechanical processing, in particular to a method for controlling tension after welding of an induction diaphragm of a capacitive thin film vacuum gauge. Background technique [0002] The cavity of the capacitive thin film vacuum gauge is equipped with a metal induction diaphragm and a fixed electrode plate. When working, the different vacuum degrees of the measured object will cause the metal induction diaphragm to deform accordingly, so that the metal induction diaphragm and the fixed electrode plate The capacitance between them changes accordingly, and the vacuum degree of the measured object is measured according to the change of the capacitance. [0003] Among them, the tension force on the metal sensing diaphragm is directly related to the deformation characteristics of the diaphragm, which in turn has an important impact on key indicators such as measurement accuracy and repeatability of t...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L21/00G01L19/00
CPCG01L21/00G01L19/00
Inventor 侯少毅胡强卫红胡琅刘乔
Owner JIHUA LAB
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