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Off-axis aspheric reflector zero compensation detection and correction method

A non-linear error, off-axis aspheric technology, used in measuring devices, instruments, optical devices, etc., can solve the problem of complex production, installation and use of the reference mask method, difficult to control the accuracy of nonlinear errors, and complex detection systems, etc. problem, to achieve the effect of correct face shape detection result feedback, wide adaptability, simple and convenient operation

Active Publication Date: 2021-12-10
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI +1
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Problems solved by technology

[0006] The present invention solves the problem that in the current zero-position compensation nonlinear error correction method, the optical correction causes the detection system to be further complicated. In the image correction, the Fiducial function calibration correction accuracy is low, and the reference mask method is relatively complicated to make, install and use. Derivation and solution Non-linear error accuracy is difficult to control and the derivation is more complicated technical problems, providing a non-linear error correction method for zero compensation detection of off-axis aspheric mirrors

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  • Off-axis aspheric reflector zero compensation detection and correction method
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[0055] The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention and the accompanying drawings. Apparently, the described embodiments do not limit the present invention.

[0056] The non-linear error correction method in the zero position detection of the off-axis aspheric mirror proposed by the present invention will be further described by taking an example of detecting an off-axis aspheric mirror by an Offner compensator as follows. Among them, the specific parameters of the measured off-axis aspheric surface are shown in Table 1:

[0057] Table 1 Off-axis aspheric parameter index

[0058] Measured off-axis aspheric parameters index Mother mirror curvature radius R -2041.718mm quadratic coefficient K -9.408 off-axis 146mm Dimensions (W*H) 280*170mm Surface accuracy (λ=632.8nm) PV≤λ / 7, RMS≤λ / 50

[0059] Such as figure 1 As sho...

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Abstract

The invention belongs to an off-axis aspheric reflector zero compensation detection and correction method, and aims to solve the technical problems that in an existing zero compensation nonlinear error correction method, a detection system is further complicated due to optical correction, Fiducial function calibration and correction precision is low in image correction, a reference mask method is complex to manufacture, install and use, and the like, the precision of deriving and solving the nonlinear error is not easy to control and deriving is relatively complex. The invention provides the nonlinear error correction method for zero compensation detection of an off-axis aspheric reflector, and the method only needs to determine the central point position of a mother mirror of a detected mirror in a detection system and correspondingly obtain the central point position of an image plane on the image plane, obtains a nonlinear error change rule by combining optical design software reverse ray tracing, and achieve high-precision correction of interference detection data nonlinear errors by combining general data processing.

Description

technical field [0001] The invention belongs to an off-axis aspheric reflector zero compensation detection and correction method, in particular to a off-axis aspheric reflector zero compensation detection nonlinear error correction method. Background technique [0002] Compared with traditional spherical surfaces, aspheric surfaces have more degrees of freedom, and can achieve the purpose of correcting and balancing system aberrations with fewer components. Therefore, they can well meet the design requirements of modern space optical systems. [0003] With the continuous improvement of system index requirements, such as the requirement of unobstructed, large aperture, and near-diffraction limit imaging, etc., the application of off-axis aspheric mirrors in the system is becoming more and more extensive. Among them, the high-precision processing and testing of off-axis aspheric mirrors It is an important factor to realize the requirements of the overall optical system index. ...

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 郝三峰张建韩路杨芝艳安飞
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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