Ricky-Common detection method and system based on virtual interferometer

Abstract

The Ricky-Common detection method and system based on the virtual interferometer method are disclosed, which can easily and quickly realize the calculation of the surface shape to be measured with high precision, reduce the requirements for the area of ​​the test site, and effectively suppress the interpolation error in the coordinate conversion method. . The method includes: measuring various parameters in the Ricky-Common detection optical path, and constructing a virtual interferometer in the optical design software; Zernike fitting is performed on the system wave aberration introduced by the plane mirror obtained by actual measurement, and the system wave aberration is obtained. Various Zernike coefficients; take the various Zernike coefficients of the system wave aberration as the optimization goal of the system, take the Zernike coefficient of the plane mirror shape to be measured as the optimization variable, and use the optimization function of the optical design software to optimize until the virtual interferometer obtains It is consistent with the system wave aberration obtained by the actual measurement; the Zernike coefficients of the mirror surface to be measured are extracted to generate the surface shape S to be measured that includes the adjustment defocus error 1 (x, y); take the Zernike coefficient of the defocus term in the system wave aberration as the optimization target, and optimize; obtain the surface shape S to be measured 0 (x,y).

Description

technical field [0001] The invention relates to the technical field of optical surface shape detection, in particular to a Ricky-Common detection method based on a virtual interferometer method, and also to a Ricky-Common detection system based on the virtual interferometer method. Background technique [0002] Optical interference is an efficient optical surface shape detection method, which can accurately reflect the surface shape quality and plays an important role in the production, processing and testing of optical components. With the continuous development of astronomical optics, the demand for large-aperture optical mirrors (>1000mm) has gradually increased, while the diameter of traditional commercial interferometers is mostly between 100mm and 150mm, and it is difficult to perform full-aperture measurements. The Ricky-Common method can better realize the full-aperture measurement of large-aperture flat mirrors. In the detection process, a spherical mirror with a...

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Problems solved by technology

However, in the actual measurement, the measurement site is limited, and it is impossible to build a long enough test optical path to ensure that the algorithm requires a large enough F / #; moreover, the longer optical path has more stringent requirements on the experimental environment, and the airflow and vibration are uncontrollable. Factors will bring huge errors to the experimental results; the coordinate transformation method accurately deduces the relationship between the mirror surface shape and the system wave aberration, but its algorithm is complex and requires interpolation operations, thus introducing interpolation errors

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