Deposition device system

Abstract

A deposition device system according to one embodiment of the present invention can comprise: a vacuum chamber; at least one viewport provided on one surface of the vacuum chamber; a deposition device including a crucible which is accommodated in the vacuum chamber and in which a deposition raw material is accommodated, a heater unit for heating the crucible, and at least one nozzle through which a deposition material evaporated from the deposition raw material passes; a camera which is positioned outside the viewport and which photographs the nozzle through the viewport; a laser which is positioned outside the viewport, and which outputs a laser beam toward the nozzle through the viewport; a laser moving means for moving, toward one point of the nozzle, the laser beam outputted from the laser; and a control part for receiving a nozzle image captured by the camera, and controlling the operations of the laser and the laser moving means according to the result of having sensed clogging in the nozzle image.

Description

[technical field] [0001] The present invention relates to a deposition device system for depositing a deposition material on a vapor deposition object, and more particularly, to a deposition device system capable of quickly detecting and effectively preventing an initial clogging phenomenon of a nozzle for discharging a deposition material. [Background technique] [0002] Deposition is a method of spraying gaseous particles onto the surface of an object such as metal or glass to form a thin solid film. [0003] Recently, as the use of organic light emitting diode (OLED) displays on electronic devices such as TVs or mobile phones increases, research on devices for OLED display panels is also active. In particular, a method of manufacturing an OLED display panel includes a process of depositing an organic material on a glass substrate in a vacuum state. [0004] Specifically, the deposition process includes a process of heating a crucible containing an organic material to eva...

AI Technical Summary

Problems solved by technology

[0010] However, according to this related technology, it is difficult to initially detect clogging occurring around nozzles and quickly respond to clogging

[0011] In addition, when the clogging phenomenon is detected to operate the first heater, the evaporation amount of the deposition material discharged from the nozzle may be excessively increased temporarily, thereby affecting the quality of the OLED display manufactured through the deposition process.

[0012] Also, when removing the first heater on the nozzle side to disassemble the crucible, there may be a problem with a large number of disconnections in the first heater

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