Deposition device system
A deposition device and deposition material technology, which are applied in spraying devices, vacuum evaporation plating, coating and other directions, can solve the problems of increased evaporation, disconnection of the first heater, difficulty in preliminary detection of nozzle clogging, and the like. The effect of preventing clogging, reducing cost and maintaining quality
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[0044] Hereinafter, the embodiments of the invention with reference to the detailed description.
[0045] figure 1 and figure 2 It is a diagram schematically illustrating when viewed from above and a front view inside the vacuum chamber of the deposition apparatus system according to an embodiment of the present invention.
[0046] Deposition device system embodiment of the present invention may include a vacuum chamber 1, the deposition means is mounted movably in the vacuum chamber 1 is 100, and is detachably provided on the side of the vacuum chamber 1 is clear blockage detection module 200, such as figure 1 and 2 Indicated.
[0047] The supporting portion 10 is provided at a lower side inside the vacuum chamber 1, the first driving portion 11 and the second driving portion 12 on the support portions 10 arranged side by side on both sides to be longer in the longitudinal direction, the third drive unit 13 in two arranged to be longer in a direction through the first drive port...
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