Preparation method of microsphere EBSD sample

Abstract

The invention discloses a preparation method of a microsphere EBSD (electron back scattered diffraction) sample. The method comprises the following steps of dispersing and spreading microspheres on a loading platform of a sample mounting machine, and covering the flatly spread microspheres with conductive insert powder; heating and melting the conductive inlay material, then cooling and solidifying the conductive inlay material to enable the microspheres to be embedded by the conductive inlay material to form an embedded structure, and embedding the microspheres in the bottom surface of the embedded structure; and polishing the bottom surface of the embedding structure to expose the to-be-detected cross section of the microsphere so as to form the microsphere EBSD sample. According to the method, microspheres are dispersed and spread on a charging platform, then conductive insert powder covers the flatly laid microspheres, the microspheres are embedded in a hot insert mode, a phenomenon of microsphere aggregation is not prone to occurring in the embedding period, the microspheres in the formed embedding structure are basically located on the bottom face of the embedding structure, and after subsequent polishing of the bottom face, more sections of the microspheres can be exposed, and requirements of statistical analysis of EBSD samples are met.

Description

technical field [0001] The invention belongs to the technical field of electron microscope sample preparation, and more specifically relates to a method for preparing a microsphere EBSD sample. Background technique [0002] Metal powder is one of the important raw materials for additive manufacturing. The microstructure, shape and size of metal powder have a great influence on the molding process parameters of additive manufacturing and the microstructure and mechanical properties of the formed shape. Therefore, it has a great influence on the microstructure of metal microspheres. Characterization is critical. Electron Backscatter Diffraction (EBSD) technology is a method of crystal structure testing based on scanning electron microscopy. The surface quality requirements of EBSD samples are relatively high. On the one hand, the surface of the sample needs to be stress-free, fresh, clean, smooth, and have good conductivity. On the other hand, in order to meet the statistical...

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Problems solved by technology

[0003] In view of the above defects or improvement needs of the prior art, the invention provides a method for preparing microsphere EBSD samples, the purpose of which is to solve the problem that microspheres are easy to aggregate during the preparation of microsphere EBSD samples and that there are too few microspheres in the maximum cross-section of EBSD samples. technical issues

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