Composite surface type X-ray piezoelectric deformable mirror

Abstract

The invention provides a composite surface type X-ray piezoelectric deformable mirror, which comprises a substrate and an optical reflecting film arranged above the substrate, wherein the upper surface of the optical reflecting film is divided into two mirror surfaces, and at least two types of piezoelectric ceramic sheets are arranged on at least one of the upper surface, the lower surface and the side surface of the substrate, so that the two mirror surfaces are respectively driven by the piezoelectric ceramic sheets to generate two required different surface types. According to the composite surface type X-ray piezoelectric deformable mirror disclosed by the invention, an active optical technology based on piezoelectric driving and a multi-surface type combined grazing incidence X-ray reflecting mirror system are integrated, and when an applied voltage is parallel to the electric polarization direction of each piezoelectric ceramic sheet, the piezoelectric stretching in the transverse direction of the piezoelectric ceramic sheet can drive the stretching of the optical substrate with the thickness changing along with the mirror length to generate local curvature needed in the meridian direction of the mirror length, so that the defect that the surface shape of the reflecting mirror is difficult to adjust is overcome; and finally, through the combination of the two surface types, an aberration-free focusing effect is realized, so that full-field imaging and focusing are realized.

Description

Technical field [0001] The present invention belongs to the active X-ray optical wave pre-correction, and specifically, a composite face type X-ray piezoelectric definition mirror, which is used to heat the focus of X-rays to achieve reduced aberration, regulatory focus spot and position. Role. Background technique [0002] In a hard X-ray band, the refractive index of any material is close to 1. Therefore, a higher reflectivity can only be obtained when the plunder is hierarchical. Therefore, the reflective reflective element that is incident is a major form of hard X-ray imaging and focusing. Common bridging reflection focusing element types include Kirkpatrick-Baez, Wolter I, II, III and LobStereye type, where the first two types are most widely used in the field of synchronous radiation microscopy and space telescope. In 1952, Wolter proposed a rotating cone surface that uses two coaxial CAFE constitutes an optical system, including three types of Wolter I, II, III, mainly ex...

AI Technical Summary

Problems solved by technology

The disadvantage of the current existing technology is that it only provides single-chip piezoelectric ceramic arrangement and driving methods, and does not apply the advantages of this piezoelectric deformation technology to the design of complex optical systems

[0005] Therefore, a new technology is needed to overcome the huge difficulties in the processing and assembly of various traditional fixed surface type such as Wolter type or LobsterEye type grazing incidence reflective elements, avoiding the need for multiple groups of mirrors to form the focusing lens, which is difficult to adjust , and costly defects

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