Vertical probe card device and detection method thereof
A probe card and probe technology, which is applied in the direction of measuring devices, measuring electricity, measuring electrical variables, etc., can solve problems such as deformation offset and probe contact problems, and achieve improved service life, good contact, and clear needle marks. Effect
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specific Embodiment approach 1
[0052] This embodiment is an embodiment of a vertical probe card device.
[0053] like Figure 1-10 As shown, a vertical probe card device disclosed in the present embodiment, includes a upper layer guide plate 1, a middle guide plate 2, a lower guide plate 3, a deformed connection device 4, a first probe 5, a second probe 6, a circuit board 7, First pad 8; the upper guide plate 1, the middle guide plate 2 and the lower guide plate 3 respectively correspond to a plurality of vertical limit via, and the upper layer guide plate 1 and the middle guide plate 2 are disposed with a plurality of deformed connecting devices. 4, one end of the plurality of the first probe 5 is electrically connected to the vertical limit vias of the upper guide plate 1 and the corresponding set of deformation connecting means 4, and the other end and the corresponding first solder on the circuit board 7 The pad 8 is connected, and one end of the plurality of the second probe 6 passes through the vertical li...
specific Embodiment approach 2
[0086] This embodiment is an embodiment of a vertical probe card device.
[0087] The test parameter setting method of a vertical probe card device disclosed in this embodiment includes the following steps:
[0088] Step A, assume the length,
[0089] First assemble some vertical probe card devices to be trial, during the assembly process, the length of the elastic needle 4-7 is disposed on the side wall of the stabilizer 4-4 during assembly, and the elastic needle 4-7 is effective length. The effective length of the elastic needle 4-7 is initially set to S, and then assemble a vertical probe card device;
[0090] Step b, flat test
[0091] The vertical probe card of the assembled to be experiment will be mounted on the carrier of the test probe station, and the contact flat test is performed one by one, and the highest point and the lowest point of the second probe 6 tip of the vertical probe card are measured. The distance between the second probe 6 tip of the second probe 6 is ...
specific Embodiment approach 3
[0112] This embodiment is an embodiment of a vertical probe card device.
[0113] A vertical probe card device probe displacement amount calculation method, including the following steps:
[0114] Step A. The material elastic modulus E and the inertial moment I of the elastic needle 4-7 are measured;
[0115] Step b, the force analysis calculates the concentration member 4-1 acts on the concentrated load of one end of the elastic needle 4-3 by the limit bead 4-3, and when the number of elastic needles is N, calculate the elastic needle 4 -7 Limit bead 4-3 concentration load is
[0116] Step C. Draw a centralized load The role is in the limit beads 4-3, the moment of the elastic needle 4-7, that is, M P picture;
[0117] Step D, plot the unit load The role is in the limit beads 4-3, the moment of the elastic needle 4-7, that is, M 1 picture;
[0118] Step e, calculate the longitudinal displacement of the limit bead 4-3 according to the multiplication
[0119] Among them: the pr...
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