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Carrier plate baking system and baking method

A baking method and a carrier plate technology are applied in the field of solar cells to achieve the effect of efficient and sufficient removal

Pending Publication Date: 2022-02-18
ZHEJIANG AIKO SOLAR ENERGY TECH CO LTD +3
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] This application provides a carrier board baking system and baking method, aiming to solve the problem of how to reduce the water vapor of the carrier board and reduce the adverse impact of the removal of water vapor on the carrier board on normal production

Method used

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  • Carrier plate baking system and baking method
  • Carrier plate baking system and baking method
  • Carrier plate baking system and baking method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] see figure 1 and figure 2 , the carrier board baking system 100 of the embodiment of the present application includes a laser baking chamber 102 and transportation equipment, the laser baking chamber 102 is provided with a laser heating source 101, and the laser heating source 101 is used for the carrier board of the silicon wafer 103 is baked, and the transport equipment is used to transport the carrier plate 103 passed out from the discharge port of the coating equipment to the laser baking chamber 102, and is used to transport the baked carrier plate 103 from the laser baking chamber 102 To the feed port of the coating equipment.

[0036] The carrier plate baking system 100 of the embodiment of the present application uses a laser heating source 101 after the carrier plate 103 of the silicon wafer is passed out of the discharge port of the coating device and before the carrier plate 103 is introduced into the feed port of the coating device. Baking the carrier pla...

Embodiment 2

[0051] In some optional embodiments, the laser baking chamber 102 is provided with a preset position for placing the carrier plate 103, the baking system 100 includes a position detector 104 arranged in the laser baking chamber, and the position detector 104 is used to detect the position of the carrier plate 103. Whether the board 103 reaches the preset position, the transportation device is used to stop the carrier board 103 at the preset position when the carrier board 103 arrives at the preset position. In this way, the carrier plate 103 is stationary and heated at the preset position in the laser baking chamber 102, avoiding low baking efficiency due to improper position, and also preventing the moving carrier plate 103 from leaving the laser before drying. The chamber 102 is baked.

[0052] Specifically, the position detector 104 may include a distance measuring device. Examples include laser ranging sensors, acoustic ranging sensors, depth cameras, and the like. When ...

Embodiment 3

[0056] In some optional embodiments, the laser baking chamber 102 is provided with a preset position for placing the carrier plate 103, the number of laser heating sources 101 is multiple, and part of the laser heating sources 101 are arranged above the preset position, and the rest The laser heating source 101 is arranged below the preset position. In this way, both sides of the carrier board 103 can be baked, with higher efficiency and better effect.

[0057] Specifically, there may be multiple preset positions. In this way, multiple carriers 103 can be baked at the same time, which can improve the efficiency of baking.

[0058] Further, the distance between adjacent preset positions is the same as the distance between adjacent carrier boards 103 on the conveyor belt. In this way, when the conveyor belt stops moving, when one carrier board 103 is located at the corresponding preset position, the rest of the carrier boards 103 are also located at the corresponding preset po...

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Abstract

The invention is suitable for the technical field of solar cells, and provides a carrier plate baking system and a baking method. The carrier plate baking system comprises a laser baking chamber and a transportation device, the laser baking chamber is provided with a laser heating source, the laser heating source is used for baking a silicon wafer carrier plate, and the transportation device is used for transporting the carrier plate conveyed out of a discharging port of the coating device to the laser baking chamber, and is used for conveying the baked carrier plate from the laser baking chamber to a feeding hole of the coating equipment. Thus, after the silicon wafer carrier plate is conveyed out of the discharging port of the coating equipment and before the carrier plate is conveyed into the feeding port of the coating equipment, the laser heating source is used for baking the carrier plate, water vapor of the carrier plate can be efficiently and fully removed, and the atmosphere in a process chamber of the coating equipment and the normal production takt are not affected.

Description

technical field [0001] The application belongs to the technical field of solar cells, and in particular relates to a baking system and a baking method for a carrier plate. Background technique [0002] In the related art, it is usually necessary to coat a film on a silicon wafer to make a solar cell. Specifically, the silicon wafer can be loaded by a carrier plate, so that the silicon wafer can be sent into the process chamber of the coating equipment for coating. However, since the carrier plate loaded with the silicon wafer enters the process chamber of the coating equipment together with the silicon wafer, the carrier plate will also gradually accumulate a thick film layer during the coating process of the silicon wafer. When the film layer is exposed to the air, it is easy to absorb water vapor in the air, so that when the carrier board is transported into the process chamber of the coating equipment again, more water vapor will be brought in, which will affect the proc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/56C23C14/58C23C16/02C23C16/50C23C16/54C23C16/56F26B15/00F26B23/04F26B25/06
CPCC23C14/02C23C14/56C23C14/58C23C16/0209C23C16/50C23C16/54C23C16/56F26B15/00F26B23/04F26B25/06
Inventor 陈刚林海
Owner ZHEJIANG AIKO SOLAR ENERGY TECH CO LTD
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