Film preparation method for improving surface shape of optical element

Abstract

The invention relates to a film preparation method for improving the surface shape of an optical element. Existing film stress is matched through a high-refractive-index film layer with tensile stress, the adverse effect of the film stress on the surface shape of the optical element is weakened, and thus the surface shape of the optical element is improved. According to the method, the surface shape of the optical element is remarkably improved, procedures can be reduced, and cost is reduced.

Description

technical field [0001] The invention belongs to the field of optical element processing, and specifically refers to a film preparation method for improving the surface shape of an optical element. Background technique [0002] As the most core optical mirror in the optical system, the quality of its surface shape directly affects the overall performance of the optical system. In high-energy laser systems, the requirements for the surface shape of single crystal silicon mirrors are also getting higher and higher. We generally use the peak-to-valley value (PV) measured by the interferometer to evaluate the surface shape of optical components. The smaller the PV, the higher the surface shape accuracy of the optical element. During the process of coating the surface of the optical element with a thin film, the optical element will be deformed due to the stress of the film, which will have an adverse effect on the surface shape. The current solution is generally non-mirror coa...

AI Technical Summary

Problems solved by technology

However, this method will increase the process and cost, and is not suitable for optical components with spectral requirements for non-mirror surfaces, so new methods are needed to improve the surface shape of optical components

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