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Vacuum system of etching equipment and anti-backflushing method

A vacuum system and etching equipment technology, applied in the field of vacuum systems, can solve problems such as jumping pumps and stopping operations, and achieve the effects of avoiding downtime for maintenance and maintenance, preventing product scrapping, and ensuring uptime

Pending Publication Date: 2022-03-08
YANGTZE MEMORY TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, due to the long-term work of the vacuum pump, there will be situations where the pump will jump and stop running.

Method used

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  • Vacuum system of etching equipment and anti-backflushing method
  • Vacuum system of etching equipment and anti-backflushing method
  • Vacuum system of etching equipment and anti-backflushing method

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Embodiment Construction

[0036] Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. In the various figures, identical elements are indicated with similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale. Also, some well-known parts may not be shown.

[0037] The invention can be embodied in various forms, some examples of which are described below.

[0038] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0039] figure 1 A schematic diagram showing the principle of the vacuum system of the etching equipment in the prior art; as figure 1 As shown, the vacuum system 100 includes a vacuum chamber 110 and a pump 120 communicating with the vacuum chamber 110 , and the pump 120 evacuates the vacuum chamber 110 to make the vacuum chamber 110 in a vacuum state.

[0040] Dur...

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Abstract

The invention discloses a vacuum system of etching equipment and an anti-backflushing method. The vacuum system comprises a vacuum chamber; the pump is communicated with the vacuum chamber and is used for vacuumizing the vacuum chamber; the anti-backflushing device is connected between the vacuum chamber and the pump and is used for preventing a medium in the pump from flowing to the vacuum chamber; the vacuum valve is connected between the vacuum chamber and the pump and used for adjusting the size of medium flow in the vacuumizing process and controlling starting and stopping of the vacuumizing process. According to the vacuum system of the etching equipment provided by the invention, the anti-back-flushing device is additionally arranged between the vacuum chamber and the pump, and when the pump jumps and stops working, the anti-back-flushing device prevents foreign matters in the pump from being recharged into the vacuum chamber, so that the vacuum degree in the vacuum chamber is ensured, the product scrapping of the vacuum chamber is prevented, and the production efficiency is improved. And meanwhile, the vacuum chamber is not influenced, so that the shutdown maintenance of the vacuum chamber is avoided, and the normal operation time of equipment is ensured.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a vacuum system method and an etching method for etching equipment. Background technique [0002] As a device for removing photoresist, Asher has a large number of applications in the field of dry etching. The reaction process of dry degumming is completed in the degumming chamber. The corrosive gas in the degumming chamber is affected by the high-frequency electric field, ionizes to generate plasma, and the plasma reacts with the photoresist film to realize the removal of the photoresist. [0003] During the process of removing the photoresist, the chamber is in a vacuum state. Specifically, the glue removal chamber is connected with a vacuum pump, and the vacuum pump vacuumizes the glue removal chamber so that the glue removal chamber is in a vacuum state. [0004] However, due to the long-term work of the vacuum pump, the pump will stop running after jumping. The vac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/18
CPCH01J37/18
Inventor 任升辉张洪春薛海宏王鑫维秦军杨杰
Owner YANGTZE MEMORY TECH CO LTD
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