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Germanium substrate 8-12 [mu] m infrared band diaphragm and preparation method thereof

A technology of infrared band and window, which is applied in the field of infrared optics, can solve the problems of low transmittance and film firmness of optical films, which cannot meet the needs of military equipment, etc., to improve transmittance, reduce absorption, and reduce film stress Effect

Active Publication Date: 2022-03-18
云南驰宏国际锗业有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For this reason, higher requirements are put forward for the infrared light transmittance and film firmness of germanium windows, while the optical film transmittance and film firmness of germanium windows produced by the existing production process are low, Unable to meet the requirements of military equipment

Method used

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  • Germanium substrate 8-12 [mu] m infrared band diaphragm and preparation method thereof
  • Germanium substrate 8-12 [mu] m infrared band diaphragm and preparation method thereof
  • Germanium substrate 8-12 [mu] m infrared band diaphragm and preparation method thereof

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the present invention is not limited in any way. Any transformation or replacement based on the teaching of the present invention belongs to the protection scope of the present invention.

[0030] A germanium-based 8-12um infrared band window, with single crystal germanium as the base, the front and back of the base are coated with the same infrared anti-reflection film structure;

[0031] The structure of the infrared anti-reflection coating on the front and back is:

[0032] base / 0.281H / 0.475M / 0.4641H / 0.644M / 0.578L / 0.126N / air;

[0033] In the formula, H represents a λ 0 / 4 optical thickness Ge film layer; M represents a λ 0 / 4 optical thickness of the ZnSe film layer; L represents a λ 0 / 4 optical thickness of YbF 3 film layer; N represents a λ 0 / 4 optical thickness of ZnS coating, λ 0 is the central wavelength, and the numbers before H, M, L...

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Abstract

The invention relates to a germanium substrate 8-12 [mu] m infrared band diaphragm and a preparation method thereof, and belongs to the field of infrared optics. The diaphragm takes single crystal germanium as a substrate, and the front and back surfaces of the substrate are plated with the same infrared antireflection film system structures; and the structures of the infrared antireflection film systems on the front surface and the back surface are as follows: a substrate / 0.281 Ge / 0.475 ZnSe / 0.4641 Ge / 0.644 ZnSe / 0.578 YbF3 / 0.126 ZnS / air. According to the principle of destructive interference and constructive interference of light, the constructive interference of light can be maximized by using a multi-layer film structure, so that the transmittance of the coated lens is maximized. In the aspect of transmittance, due to the fact that Ge, YbF3, ZnS and other coating materials have absorption in the light-transmitting wave band, and meanwhile, tensile pressure stress between the film layers also absorbs light in the wave band, the thickness of the film layers with absorption is reduced to the minimum, and meanwhile, ZnSe materials with more perfect light-transmitting performance are adopted in the second coating film and the fourth coating film, so that the transmittance is improved, and the light-transmitting effect is improved. And in the film plating process, the film layer stress is reduced by adopting the modes of ion source assistant plating and bombardment before and after ion source plating, so that the film layer strength is enhanced while the absorption is reduced, and the transmittance is improved.

Description

technical field [0001] The invention belongs to the field of infrared optics, and in particular relates to a germanium-based 8-12um infrared band window and a preparation method thereof. Background technique [0002] Anti-reflection coating is also called anti-reflection coating. In optical components, light energy is lost due to the reflection on the surface of the component. transparent effect. The original anti-reflection coating is achieved by depositing a single layer of anti-reflection film material on the surface of the component, which can only anti-reflection for a single specific wavelength of electromagnetic waves. In order to achieve anti-reflection in a wider range and more wavelengths, it can be achieved by depositing multi-layer films. With the research experience on anti-reflection coatings, more materials that can be used as anti-reflection coatings have been discovered. At the same time, due to the development of coating technology, the application of ant...

Claims

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Application Information

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IPC IPC(8): G02B1/115C23C14/26C23C14/30C23C14/58C23C14/02C23C14/06C23C14/16C23C14/22
CPCG02B1/115C23C14/26C23C14/30C23C14/221C23C14/022C23C14/0629C23C14/16C23C14/0694C23C14/5833Y02P70/50
Inventor 崔丁方钱海东陈琳杨康李俊仪王博文姜俊王爽刘勇
Owner 云南驰宏国际锗业有限公司
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