Anti-overload MEMS movable structure with strain self-counteracting function

Abstract

The invention discloses an anti-overload MEMS (Micro Electro Mechanical System) movable structure with a strain self-counteracting function. Comprising a first movable mass block, a second movable mass block, a first structural unit, a second structural unit, a third structural unit, a fourth structural unit, a first anti-overload fixing anchor area, a second anti-overload fixing anchor area, a first anti-overload strain beam, a second anti-overload strain beam, a first anti-overload supporting beam and a second anti-overload supporting beam. Wherein the first structural unit, the second structural unit, the third structural unit and the fourth structural unit are the same in structure, and each of the first structural unit, the second structural unit, the third structural unit and the fourth structural unit comprises a mass block comb tooth, a driving comb tooth, a driving comb tooth anchor area, a rotary vibration beam, a rotary adjusting beam, a bending vibration beam fixed anchor area, a bending vibration beam and a stress release beam. According to the invention, structural fracture caused by overlarge structural displacement when the movable MEMS structure is subjected to large impact in the movement direction is avoided, the method can be applied to MEMS gyroscope structural design, the anti-overload characteristic of the structure is improved, the resonant frequency stability is improved, and the driving detection orthogonal coupling is reduced.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems (MEMS) manufacturing, in particular to an anti-overload MEMS movable structure with strain self-offsetting. Background technique [0002] MEMS device is a new type of micro-mechanical instrument developed in the past two decades, which uses semiconductor processing technology to process micro-mechanical structures. A typical MEMS device consists of a movable mass structure, an elastic beam, an anchor area, electrodes, etc. Through different structural designs, it can realize the measurement of physical quantities such as force, displacement, and angular velocity, and can also realize resonators, filters, etc. functions to meet the needs of different applications. [0003] Resonant MEMS devices control the movement of movable MEMS structures by driving electrodes to meet certain specific requirements, and MEMS gyroscopes are typical representatives. MEMS gyroscopes need to...

AI Technical Summary

Problems solved by technology

However, the stiffness of the elastic beam is low. When the gyroscope is subjected to a large external impact, the mass block will have a large displacement in the direction of motion, which may collide with other structures or cause structural damage due to excessive deformation of the elastic beam.

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