Liquid nitrogen drainage device, liquid nitrogen drainage method and chip testing system

Abstract

The invention discloses a liquid nitrogen drainage device, a liquid nitrogen drainage method and a chip testing system. The liquid nitrogen drainage device comprises a first Dewar which is not sealed, provides a low-temperature environment by using liquid nitrogen, is internally provided with a chip bearing table for bearing a chip to be tested, and is connected with a second Dewar through a first drainage pipe, and the height of the first drainage pipe is lower than that of the chip bearing table; a first electromagnetic valve is arranged on the first liquid discharge pipe; the first electromagnetic valve is connected with the control module and is opened or closed according to a control signal of the control module so as to start or stop discharging the liquid nitrogen in the first Dewar into the second Dewar; the second Dewar flask is sealed through an end cover, a liquid level meter is arranged on the end cover, the input end of the liquid level meter is close to the bottom of the second Dewar flask, and the liquid level meter is connected with the control module. According to the liquid nitrogen drainage device, the liquid nitrogen in the first Dewar is recycled after the low-temperature test on the chip is finished, the chip test efficiency and the effective utilization rate of the liquid nitrogen are improved, and low-temperature damage caused by liquid nitrogen leakage is avoided.

Description

technical field [0001] The invention relates to the technical field of chip testing, in particular to a liquid nitrogen drainage device, a liquid nitrogen drainage method and a chip testing system. Background technique [0002] During the chip testing process, liquid nitrogen fluid is used to provide a controlled ultra-low temperature test environment for the device under test. The chip test system realizes the testing of chip electrical performance parameters through the physical contact between the probe tip and the chip pad. The test process requirement that the chip is immersed in the liquid nitrogen fluid determines that the liquid nitrogen container has an open structure. When the chip test system is working, the chip to be tested is placed on the wafer support set in the liquid nitrogen container. According to the process requirements, part of the liquid nitrogen needs to be discharged during chip loading / unloading operations to reduce the liquid nitrogen level and en...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a liquid nitrogen drainage device to solve the technical problems in the prior art that the gasification of the liquid nitrogen is serious when the liquid nitrogen is discharged, causing the liquid nitrogen to leak slowly and the liquid nitrogen cannot be recovered reasonably and effectively, so as to realize part of the process of chip testing. Rapid discharge and recovery of all liquid nitrogen after liquid nitrogen and chip testing, improve chip testing efficiency and effective utilization of liquid nitrogen, and avoid low temperature damage caused by liquid nitrogen leakage

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