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Powder loading device of ITO (indium tin oxide) rotating target

A technology of rotating target and powder loading, applied in ion implantation coating, mold, ceramic forming core, etc., can solve the problems of affecting the quality of target material, loose powder body, low labor efficiency, etc., to ensure quality and improve molding. Density, the effect of improving powder loading efficiency

Pending Publication Date: 2022-04-29
XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing powder filling process is manually beaten and compacted, which not only wastes manpower, but also has low labor efficiency, and the produced green powder is relatively loose and low in density, which seriously affects the quality of the post-production target material.

Method used

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  • Powder loading device of ITO (indium tin oxide) rotating target
  • Powder loading device of ITO (indium tin oxide) rotating target
  • Powder loading device of ITO (indium tin oxide) rotating target

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Embodiment Construction

[0019] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0020] Such as figure 1 As shown, a powder loading device for an ITO rotary target in a preferred embodiment of the embodiment of the present invention includes a mold body 1 and a drive mechanism 2. The interior of the mold body 1 is coaxially provided with a mandrel 5, and the mold body 1 and the mandrel 5 It is used to fill the ITO powder 4 in between. The outside of the mold body 1 is provided with a hammering mechanism 3 that can move up and down. The driving mechanism 2 is detachably arranged at the lower end of the mold body 1 for driving the mold body 1 to rotate.

[0021] Based on the above-mentioned technical characteristics of the ITO rotary target powder loadi...

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PUM

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Abstract

The invention relates to the technical field of target materials, and discloses an ITO rotating target powder loading device which comprises a mold body and a driving mechanism, a mandrel is coaxially arranged in the mold body, the space between the mold body and the mandrel is used for being filled with ITO powder, a hammering mechanism is arranged on the outer side of the mold body in a vertically movable mode, and the driving mechanism is arranged on the mold body. The driving mechanism is detachably arranged at the lower end of the mold body and used for driving the mold body to rotate. When the target material blank is manufactured, ITO powder is loaded into the cavity between the mold main body and the mold mandrel, then the driving mechanism drives the mold main body to rotate, and meanwhile, the hammering mechanism hammers the outer wall of the mold main body in an up-and-down moving mode, so that all-directional hammering on the mold main body is achieved, the density of the target material blank is guaranteed, and the production efficiency of the target material blank is improved. Therefore, the forming density of the ITO rotating target is improved, and the quality of the target material is ensured. Meanwhile, due to the fact that the hammering mechanism is adopted for flapping and tamping, labor force is saved, and powder loading efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of target material preparation, in particular to a powder loading device for an ITO rotary target. Background technique [0002] During the molding process of the ITO rotary target, it needs to be filled with powder to make a green body, and then the green body is sintered into a target material. However, the existing powder filling process is manually beaten and compacted, which not only wastes manpower, but also has low labor efficiency, and the produced green powder is relatively loose and low in density, which seriously affects the quality of the post-production target material. Contents of the invention [0003] In order to solve the above technical problems, the present invention provides a powder loading device for an ITO rotary target, which improves the powder loading efficiency, reduces labor force, increases the molding density of the ITO rotary target, and ensures the quality of the target. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28B1/087B28B7/16B28B7/00B28B7/28C23C14/34C23C14/08
CPCB28B1/087B28B7/16B28B7/0002B28B7/28C23C14/3414C23C14/086
Inventor 郭庆生陈曦朱刘潘建坤
Owner XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD