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Gas cylinder rack capable of automatically switching double cylinders and continuously supplying gas in field of semiconductor gas supply

An automatic switching and semi-conductor technology, applied in the field of gas cylinder racks, to achieve continuous gas supply and improve safety

Pending Publication Date: 2022-05-10
理纯(上海)洁净技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide a gas cylinder rack with double-bottle automatic switching and continuous gas supply in the field of semiconductor gas supply, which can solve the existing problems

Method used

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  • Gas cylinder rack capable of automatically switching double cylinders and continuously supplying gas in field of semiconductor gas supply
  • Gas cylinder rack capable of automatically switching double cylinders and continuously supplying gas in field of semiconductor gas supply
  • Gas cylinder rack capable of automatically switching double cylinders and continuously supplying gas in field of semiconductor gas supply

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033]Clamping mechanism 6 comprises arc clamping block 601, connecting plate 602, buffer air cushion 603, limit seat 604, limit post 605, telescoping spring 606, one-way exhaust head 607, inflation head 608 and filter tip 609, arc clamp The block 601 is arranged above the support seat 1, the connecting plate 602 is fixed on the bottom of the arc-shaped block 601 near the two sides, the buffer air cushion 603 is bonded to the inner side of the arc-shaped block 601, and the limit seat 604 is embedded in the support Inside the seat 1, the limit column 605 is fixed on the lower surface of the connecting plate 602, and one end of the telescopic spring 606 is fixed on the bottom end of the limit column 605, and the other end of the telescopic spring 606 extends to the inside of the limit seat 604. The exhaust head 607 is evenly arranged on the inner side of the cushion air cushion 603, the inflatable head 608 is arranged on the outer surface of the cushion air cushion 603, the filte...

Embodiment 2

[0035] The tensioning protection mechanism 11 comprises a fixed column 1101, a tensioning rod 1102, a protective frame 1103, a threaded pin 1104 and a threaded groove 1105, the fixed column 1101 is fixed on the upper surface of the support base 1, and one end of the tensioning rod 1102 is fixed on the connecting frame 2 The outer surface of the tension rod 1102 is pressed against the top of the fixed column 1101, the threaded pin 1104 runs through the top of the fixed column 1101, and the end of the threaded pin 1104 extends to the inside of the tension rod 1102, the thread groove 1105 is set inside the fixed column 1101 and the tension rod 1102, the tension rod 1102 is fixedly connected with the fixed column 1101 through the threaded pin 1104 and the thread groove 1105, and the tension protection mechanism 11 can be carried out between the support seat 1 and the connecting frame 2 Tightening can prevent the pipeline connected to the gas cylinder holder from loosening, and at t...

Embodiment 3

[0037] The switching drive mechanism 22 includes a driving seat 2201, No. 1 electromagnet 2202, transverse pull rod 2203, No. 2 electromagnet 2204 and return spring 2205. The driving seat 2201 is arranged inside the three-way valve seat 17, and the No. 1 electromagnet 2202 is embedded in Inside the three-way valve seat 17, one end of the transverse tie rod 2203 is connected to the drive seat 2201, the second electromagnet 2204 is fixed on the other end of the transverse tie rod 2203, and one end of the return spring 2205 is fixed on the outer surface of the first electromagnet 2202, and The other end of back-moving spring 2205 is fixed on the outer surface of No. 2 electromagnet 2204, and driving seat 2201 is movably connected with three-way valve seat 17 through No. The driving mechanism 22 can facilitate the switching and blocking of the driving seat 2201 on both sides of the three-way valve seat 17, thereby realizing automatic switching of two bottles and continuous gas supp...

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Abstract

The invention discloses a gas cylinder rack capable of automatically switching double cylinders and continuously supplying gas in the field of semiconductor gas supply, the gas cylinder rack comprises a supporting seat and a connecting frame, the connecting frame is located on the outer side of the supporting seat, mounting plates are fixedly mounted at the positions, close to the two sides, of the bottom of the connecting frame, and mounting pins are connected to the interiors of the mounting plates in a penetrating manner; a gas supply bottle is placed at the top of the supporting seat; according to the gas cylinder rack, a gas supply cylinder can be clamped through the arranged clamping mechanism, so that the gas supply cylinder can be conveniently replaced and mounted, tensioning can be performed between the supporting seat and the connecting rack through matched use of the arranged tensioning protection mechanism, the fixed column and the tensioning rod, and the situation that a pipeline connected with the gas cylinder rack is loosened can be prevented; according to the gas cylinder rack pipeline protection device, protection can be carried out above the gas cylinder rack pipeline, the use safety of the gas cylinder rack pipeline is improved, through the arranged switching driving mechanism, the driving seat can be conveniently switched and plugged on the two sides of the three-way valve seat, and therefore automatic switching and continuous gas supply of double cylinders can be achieved.

Description

technical field [0001] The invention belongs to the technical field of gas supply, and more specifically relates to a gas bottle holder for automatic switching of double bottles and continuous gas supply in the field of semiconductor gas supply. Background technique [0002] The gas supply system can provide a stable flow of protective gas or special gas to gas equipment or areas. The gas supply system is composed of gas cylinders, pressure reducing valves, preheaters, flowmeters, dryers and pipelines. The gas cylinder rack with double-bottle automatic switching and continuous gas supply in the field of semiconductor gas supply is a double-bottle automatic A gas supply device for switching and continuously supplying gas. This solution specifically relates to a gas cylinder rack for automatic switching of double bottles and continuously supplying gas in the field of semiconductor gas supply. [0003] The existing gas cylinder holder for gas supply has certain disadvantages i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C13/08F17C13/02F17C13/04
CPCF17C13/08F17C13/025F17C13/045F17C2205/013F17C2205/0153F17C2205/0323F17C2250/043
Inventor 朱俭李兰
Owner 理纯(上海)洁净技术有限公司
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