High-frequency surface acoustic wave resonator and preparation method thereof
A high-frequency surface acoustic wave and resonator technology, applied in the direction of impedance network, electrical components, etc., can solve the problems of high preferred orientation, thermal stress material deformation and cracking of multi-layer film structure, and achieve high electromechanical coupling coefficient, low working temperature, The effect of reducing thermal stress
Pending Publication Date: 2022-05-17
SOUTH CHINA UNIV OF TECH
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Abstract
The invention discloses a high-frequency surface acoustic wave resonator and a preparation method thereof, relates to a microelectronic device for 5G communication, and provides the scheme for solving the problems of high bonding transfer temperature, low electromechanical coupling coefficient and the like in the prior art. A first bonding metal layer is arranged on the end face, away from the first substrate, of the high-sound-velocity substrate, a second bonding metal layer is arranged on the end face, away from the interdigital electrode, of the piezoelectric film, and bonding processing of the piezoelectric film and the high-sound-velocity substrate is completed through the first bonding metal layer and the second bonding metal layer. The method has the advantages that the method is compatible with a low-temperature metal bonding process, the working temperature of metal bonding is lower, and the thermal stress of a device can be greatly reduced. And secondly, metal bonding can enable a bonding interface to obtain higher bonding energy, and the device is more stable. Besides, the X-cut lithium niobate is used as the piezoelectric film, and the included angle of 44 degrees is formed between the vertical direction of the interdigital electrode and the Z axis of the piezoelectric film, so that a higher electromechanical coupling coefficient can be obtained, and the bandwidth of the device is improved.
Application Domain
Impedence networks
Technology Topic
Metallic bondingThin membrane +9
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