Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same

A technology for fixing devices and deposition devices, which is applied in the direction of chemical instruments and methods, crystal growth, and chemically reactive gases. The effect of deposition efficiency

Pending Publication Date: 2022-05-17
VIEWORKS
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In addition, in the prior art, the structure for controlling the temperature of the heater provided in the scintillator depositor, wherein the scintillator depositor is used for the scintillator deposition process, only has a simple heating (heating) function, or cannot be subtle temperature-controlled structure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same
  • Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same
  • Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0059] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, it should be noted that when assigning reference numerals to constituent elements in each drawing, the same constituent elements should be assigned the same reference numerals as much as possible even in different drawings. In addition, when describing the present invention, if it is judged that the detailed description of related known structures or functions will make the gist of the present invention unclear, the detailed description will be omitted. Preferred embodiments of the present invention will be described below, however, the technical spirit of the present invention will not be limited or restricted by the preferred embodiments, and can be modified and implemented in various forms by those skilled in the art.

[0060] figure 1 is a diagram showing a conceptual diagram of a substrate deposition apparatus 100 accor...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The substrate fixing apparatus of the present invention is an apparatus for fixing a substrate such that a deposition material evaporated from at least one evaporation source is deposited on the substrate. The substrate fixing device comprises a substrate temperature adjusting part used for transferring heat to the substrate; and a substrate fixing part which is coupled to one side surface of the substrate temperature adjusting part and is used for fixing the substrate, the substrate fixing part is used for fixing the substrate in a manner that the front surface of the substrate is exposed to the direction of the evaporation source, and a space is formed between the substrate fixing part and the back surface of the substrate.

Description

technical field [0001] The present invention relates to a substrate fixing device for scintillator deposition, a substrate deposition device including the same, and a scintillator deposition method using the same, and more particularly, to substrate fixing using back side cooling A device, a substrate deposition device including the device, and a scintillator deposition method using the device. Background technique [0002] There are X-ray detectors and flat panel detectors as radiographic devices used for medical image diagnosis and non-destructive testing. The X-ray detector converts irradiated X-rays directly into electrical signals to detect In the way of image signal, the flat panel detector converts the radiation passing through the object into light in the scintillator, and detects the converted light emitted by the scintillator by the light receiving element. [0003] In the scintillator, in order to efficiently transmit the light emitted from the scintillator to th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C23C14/24C23C14/50C23C14/54C23C14/56
CPCC23C14/24C23C14/541C23C14/505C23C14/56C30B25/12C30B25/10C30B25/16G01T1/20
Inventor 柳仁赫
Owner VIEWORKS
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com