Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same

A technology for fixing devices and deposition devices, which is applied in the direction of chemical instruments and methods, crystal growth, and chemically reactive gases. The effect of deposition efficiency

Pending Publication Date: 2022-05-17
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In addition, in the prior art, the structure for controlling the temperature of the heater provided in the scintillator depositor, wherein the scintillator depositor is used for the scintillator deposition process, only has a simple heating (heating) function, or cannot be subtle temperature-controlled structure

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  • Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same
  • Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same
  • Substrate fixing apparatus for scintillator deposition, substrate deposition apparatus including same, and scintillator deposition method using same

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[0059] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, it should be noted that when assigning reference numerals to constituent elements in each drawing, the same constituent elements should be assigned the same reference numerals as much as possible even in different drawings. In addition, when describing the present invention, if it is judged that the detailed description of related known structures or functions will make the gist of the present invention unclear, the detailed description will be omitted. Preferred embodiments of the present invention will be described below, however, the technical spirit of the present invention will not be limited or restricted by the preferred embodiments, and can be modified and implemented in various forms by those skilled in the art.

[0060] figure 1 is a diagram showing a conceptual diagram of a substrate deposition apparatus 100 accor...

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Abstract

The substrate fixing apparatus of the present invention is an apparatus for fixing a substrate such that a deposition material evaporated from at least one evaporation source is deposited on the substrate. The substrate fixing device comprises a substrate temperature adjusting part used for transferring heat to the substrate; and a substrate fixing part which is coupled to one side surface of the substrate temperature adjusting part and is used for fixing the substrate, the substrate fixing part is used for fixing the substrate in a manner that the front surface of the substrate is exposed to the direction of the evaporation source, and a space is formed between the substrate fixing part and the back surface of the substrate.

Description

technical field [0001] The present invention relates to a substrate fixing device for scintillator deposition, a substrate deposition device including the same, and a scintillator deposition method using the same, and more particularly, to substrate fixing using back side cooling A device, a substrate deposition device including the device, and a scintillator deposition method using the device. Background technique [0002] There are X-ray detectors and flat panel detectors as radiographic devices used for medical image diagnosis and non-destructive testing. The X-ray detector converts irradiated X-rays directly into electrical signals to detect In the way of image signal, the flat panel detector converts the radiation passing through the object into light in the scintillator, and detects the converted light emitted by the scintillator by the light receiving element. [0003] In the scintillator, in order to efficiently transmit the light emitted from the scintillator to th...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/50C23C14/54C23C14/56
CPCC23C14/24C23C14/541C23C14/505C23C14/56C30B25/12C30B25/10C30B25/16G01T1/20
Inventor 柳仁赫
Owner VIEWORKS
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