Large-stroke and adjustable multichannel eddy current micro-displacement sensor parallel calibration device

Abstract

The invention discloses a large-stroke and adjustable multi-channel eddy current micro-displacement sensor parallel calibration device, which is characterized in that a probe support frame for mounting a sensor probe and a translation platform support frame for mounting a translation platform are fixedly arranged on a substrate, an inside micrometer is fixed on a micrometer support frame, a head of the inside micrometer is in contact with a ball on the side surface of the translation platform, and the inside micrometer is fixed on the translation platform support frame; the inside micrometer, the ruler head and the tension spring in the translation table are rotated to drive the translation table to move, so that the measured object is driven to horizontally move, the distance between the measured object and the sensor probe is changed, the variable quantity is read through the inside micrometer, and the output information of the sensor is synchronously recorded; and repeating the process to obtain multiple groups of sensor input and output signals, and obtaining a calibration result of the eddy current micro-displacement sensor through data fitting. According to the invention, the offset distance and the measurement stroke can be adjusted according to application requirements, and calibration of eddy current micro-displacement sensors of various specifications can be met. And a plurality of sensor probe supporting frames can be arranged, so that parallel calibration of the multi-channel sensor is realized, and the working efficiency is improved.

Description

technical field [0001] The invention belongs to the technical field of detection, in particular to a large-stroke and adjustable parallel calibration device for multi-channel eddy current micro-displacement sensors. Background technique [0002] As a non-contact, high-precision micro-displacement measuring element, the eddy current micro-displacement sensor is widely used in displacement, vibration and The measurement of physical quantities such as , rotational speed, metal film thickness, geometric dimensions of metal components, and surface roughness plays an important role in industrial production, aviation industry, nuclear industry, petrochemical industry, safety testing and other fields. [0003] When the eddy current micro-displacement sensor is applied, the offset distance needs to be set first, and the measurement stroke should be set on the basis of the offset distance. Different application occasions have different requirements for the measurement stroke of the e...

AI Technical Summary

Problems solved by technology

For some eddy current micro-displacement sensors with low index requirements, the complexity and cost of this method are high, so there is an urgent need for a simple calibration device that can meet the needs of multi-channel, multi-range and adjustable eddy current micro-displacement sensors. Parallel calibration improves calibration efficiency while reducing the complexity and cost of calibration devices

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