Preparation process of electronic grade propylene

Abstract

The invention provides a preparation process of electronic grade propylene, which comprises the following steps of: firstly, introducing propylene raw material gas into the lower part of a scrubber tower, and obtaining a mixture of propane and an extracting agent at the tower bottom of the scrubber tower; the generated mixture is introduced into a flash tank, propane gas is obtained at the top of the flash tank, a pure extractant substance is obtained at the bottom of the flash tank, propylene without propane is obtained at the top of a scrubber tower, the propylene is introduced into a light component removal tower, light component impurities are obtained at the top of the light component removal tower and are treated and discharged, and propylene without light component impurities is obtained at the bottom of the light component removal tower; and introducing the obtained propylene into a de-heavy tower to obtain an electronic-grade propylene product at the top of the de-heavy tower. Propane impurities which are difficult to separate by conventional rectification in the raw material propylene are separated by utilizing an extraction gas washing method, so that the overhigh operation pressure, reflux ratio and number of tower plates are avoided, the energy consumption is greatly reduced, the process route is safe and reliable, the product quality is controllable, and large-scale industrial production is easy to realize.

Description

Technical field [0001] The present invention belongs to the field of propylene preparation process technology, specifically relates to a kind of preparation process of electronic grade propylene. Background [0002] Electronic grade propylene is a new type of material that appears in the development of semiconductor technology. Mainly used in the integrated circuit manufacturing process, as a film-forming gas, the main role is amorphous silicon carbon growth. Electronic grade, research grade propylene purity requirements of at least 99.99%, in addition to water, oxygen, carbon monoxide, carbon dioxide and C1-C4 components and other impurities have specific purity requirements, the establishment of a stable purification system can prepare electronic grade propylene. [0003] Among the various impurities of propylene raw materials, propane is a component that is more difficult to remove. Due to the small boiling point difference and relative volatility of propylene-propane, the num...

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Problems solved by technology

[0004] Application number 2014104618361 uses extractive distillation to separate propane and propylene, but chooses to extract the main component propylene, the subsequent separation process is complicated, energy consumption is increased, and the amount of extractant is large

At the same time, although the extraction and rectification technology can reduce energy consumption to a certain extent compared with the conventional distillation method for separating and purifying propylene and propane, the method of pressurized rectification is still used in the extraction agent recovery section, so the energy consumption of the whole process remains the same. higher

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