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Mask plate, manufacturing method thereof and display panel

A display panel and mask technology, which is used in the manufacture of semiconductor/solid-state devices, coatings, electrical solid-state devices, etc. Guaranteed flatness, reducing the effect of shadow areas

Pending Publication Date: 2022-05-27
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, during the coating process, due to the inevitable gap (Gap) between the mask and the substrate, shadow areas are prone to appear
Once the shadow range is too large, it is easy to cause peeling of the film layer, cracks in cutting, affect the packaging effect of the frame, and even cause the touch (Touch) to fail

Method used

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  • Mask plate, manufacturing method thereof and display panel
  • Mask plate, manufacturing method thereof and display panel
  • Mask plate, manufacturing method thereof and display panel

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Embodiment Construction

[0039] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the accompanying drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. And in the case of no conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other. Based on the described embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0040] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the ordinary meanings understood by those having ordinary skill in the field to w...

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PUM

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Abstract

The invention provides a mask plate, a manufacturing method thereof and a display panel, the mask plate comprises: a body, the body is provided with a plurality of opening structures which penetrate through the thickness direction and are arranged in an array, and the plurality of opening structures are used for depositing a functional material to a display area of the display panel; the body is divided into partition areas located between the opening structures and a frame body area surrounding the opening structures, the body is provided with at least two mutually independent slotting structures in the partition areas, and a set distance is formed between each slotting structure and the adjacent opening structure. The method is used for reducing a shadow area and improving the manufacturing efficiency of the display panel.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate, its manufacturing method and a display panel. Background technique [0002] The functional layer for Organic Light-Emitting Diode (OLED) is usually coated by chemical vapor deposition (CVD) based on a mask. For example, the inorganic film layer commonly used for water blocking layer in thin film encapsulation layer (Thin Film Encapsulation, TFE) can be coated by CVD. However, during the film coating process, due to the unavoidable gap (Gap) between the mask plate and the substrate, shadow areas are likely to appear. Once the shadow range is too large, it is easy to cause peeling of the film layer, cracks in cutting, affect the packaging effect of the frame, and even cause the touch (Touch) to fail. How to reduce the shadow area has become an urgent technical problem to be solved. Contents of the invention [0003] The invention provides a mask plate, its manuf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/04H01L51/00H01L51/56H10K99/00
CPCC23C16/042H10K71/166H10K71/00
Inventor 何庆燕青青王格袁晓敏蒋志亮
Owner BOE TECH GRP CO LTD
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