Thin film welding method of capacitive thin film vacuum gauge

Abstract

The invention relates to the technical field of measuring instruments, and particularly discloses a thin film welding method for a capacitive thin film vacuum gauge, which comprises the following steps of: heating a central diaphragm according to a preset temperature, and setting the preset temperature according to the tension requirement and the material characteristic of the central diaphragm; combining a lower cavity, a central diaphragm and an upper cavity of the capacitive film vacuum gauge, and carrying out heat preservation, so that the lower cavity and the upper cavity clamp the edge of the central diaphragm at a preset temperature; welding and fixing the lower cavity, the central diaphragm and the upper cavity to form a combined body; standing and cooling the assembly; according to the method, the heated central diaphragm is welded by utilizing the characteristic of thermal expansion and cold contraction of the central diaphragm, so that the central diaphragm in the standing and cooling combined body has the tensile force meeting the tensile force requirement, the tensioning treatment of tensioning equipment is omitted, the central diaphragm meets the processing quality requirement of the capacitive film vacuum gauge, and the processing efficiency of the capacitive film vacuum gauge is improved. And the product percent of pass is effectively improved.

Description

technical field [0001] The present application relates to the technical field of measuring instruments, and in particular, to a thin film welding method of a capacitive thin film vacuum gauge. Background technique [0002] The core part of the metal diaphragm capacitive thin film vacuum gauge is the central diaphragm, which uses the deformation generated by the pressure difference on both sides of the central diaphragm to measure the gas pressure. [0003] In order to ensure the strength and sealing performance of the central diaphragm, the central diaphragm is often welded to the cavity of the vacuum gauge by welding; the tension on the central diaphragm is directly related to the deformation characteristics of the diaphragm, therefore, the central diaphragm The tension force of the sheet is closely related to the key indicators such as the measurement accuracy and repeatability of the film vacuum gauge. [0004] In the prior art, the manufacturing process of the capacitiv...

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Problems solved by technology

[0004] In the prior art, the manufacturing process of capacitive thin-film vacuum gauges generally uses tensioning equipment to tension the central diaphragm, and then arranges the central diaphragm in the lower cavity and the upper cavity before welding; this processing method has tension It is difficult to control, and the residual stress in the welding process is easy to couple with the tension force, resulting in uncertain effects, which seriously restricts the product qualification rate

[0005] For the above problems, there is no effective technical solution

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