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Grinding disc flatness detection method, device and equipment and storage medium

A detection equipment and detection method technology, applied in the direction of measuring device, optical device, mechanical roughness/irregularity measurement, etc., can solve the problems of difficulty in meeting accuracy requirements, low efficiency, and measurement results that cannot fully reflect the surface shape of the grinding disc. , to achieve good practical significance and high efficiency

Active Publication Date: 2022-06-24
HUAQIAO UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method has serious accuracy problems. The shaking of the benchmark and the movement of the hand will affect the accuracy of the measurement, and the measurement results require micron-level accuracy, so this method is difficult to meet the accuracy requirements
At the same time, due to manual measurement, the measurement speed of this method is slow and the efficiency is low. It often takes more than 20 minutes for one measurement, and the rough measurement results cannot fully reflect the surface shape of the entire grinding disc.

Method used

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  • Grinding disc flatness detection method, device and equipment and storage medium
  • Grinding disc flatness detection method, device and equipment and storage medium
  • Grinding disc flatness detection method, device and equipment and storage medium

Examples

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Embodiment 1

[0071] see figure 1 and figure 2 , the first embodiment of the present invention provides a detection device 2 for the flatness of a grinding disc 3, which includes a rotary positioning component 15, a linear displacement component 8, a measuring component 4 and a control component.

[0072] The rotary positioning assembly 15 includes a fixed base 18 for engaging with the grinding device 1 , and a rotating base 19 rotatably mounted on the fixed base 18 . The linear displacement assembly 8 includes a linear base 12 connected to the rotary base 19 , a linear guide 11 and a lead screw 9 connected to the linear base 12 , a slide table connected to the linear guide 11 and the lead screw 9 , and a drive connected to the lead screw 9 Piece 13. The driving member 13 is used to drive the screw 9 to rotate, thereby moving the sliding table. The measurement assembly 4 includes a detection member 5 engaged with the slide. Among them, the detecting element 5 is used for detecting the ...

Embodiment 2

[0080] see Figure 3 to Figure 11 , the first embodiment of the present invention provides a method for detecting the flatness of a grinding disc, which can be performed by a detecting device for the flatness of a grinding disc. In particular, it is performed by one or more processors in the detection device to realize steps S1 to S5.

[0081] S1. Acquire N pieces of radial measurement data of the grinding disc. Wherein, each piece of radial measurement data includes Y pieces of height data distributed along the radial direction.

[0082] It is understandable that, due to the large volume of the grinding disc and the small installation space of the machine bed of the grinding equipment, it is impossible to sample each data point of the grinding disc. Therefore, the grinding disc is divided into n equal parts, and the laser displacement sensor on the slider is controlled by the control component to move along the screw at the set speed and path, and a radial data acquisition ...

Embodiment 3

[0125] see Figure 14 , the first embodiment of the present invention provides a detection device for the flatness of a grinding disc, which includes:

[0126] The radial measurement data acquisition module 111 is used to acquire N pieces of radial measurement data of the grinding disc. Wherein, each piece of radial measurement data includes Y pieces of height data distributed along the radial direction.

[0127] The initial data acquisition module 222 is used to eliminate the mechanical errors of the N pieces of radial measurement data respectively, so as to obtain the N pieces of initial data. Wherein, each piece of initial data includes height information of a plurality of grinding blocks and grooves arranged at intervals.

[0128] The grinding block surface height data acquisition module 333 is configured to average the height information of each grinding block according to the N pieces of initial data, and delete the height information of non-grinding blocks to obtain N...

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Abstract

The embodiment of the invention provides a grinding disc flatness detection method and device, equipment and a storage medium, and relates to the technical field of flatness measurement. The detection method comprises the steps from S1 to S5. S1, acquiring N pieces of radial measurement data of the grinding disc; s2, respectively eliminating mechanical errors of the N pieces of radial measurement data to obtain N pieces of initial data; and S3, according to the N pieces of initial data, averaging the height information of each grinding block, and deleting the height information of non-grinding blocks to obtain the surface height data of the N pieces of grinding blocks. And S4, respectively scaling the surface height data of the N grinding blocks to the same data length, and then calculating an average value to obtain the radial height data of the grinding disc. And S5, performing three-dimensional reconstruction according to the radial height data of the grinding disc to obtain a surface model of the grinding disc. By adopting the detection method disclosed by the invention, the surface model of the grinding disc can be quickly calculated according to the measured height data, so that the flatness of the grinding disc can be quickly identified, and the detection method has very good practical significance.

Description

technical field [0001] The present invention relates to the technical field of flatness measuring devices, and in particular, to a method, device, equipment and storage medium for detecting the flatness of a grinding disc. Background technique [0002] Double-sided grinding is the main method for processing thin-film parts such as semiconductor substrates, mobile phone panels, and glass sheets. Since double-sided grinding processes both sides of the workpiece at the same time, the processing efficiency is high and the processing stability is excellent. [0003] With the increase of the accumulated material removal, the grinding disc will be worn out, and due to the different trajectories on the surface of the grinding disc at different positions, the surface of the grinding disc will wear unevenly. When the surface profile of the grinding disc is deteriorated, the stability of the processing will be reduced and the surface quality of the processed workpiece will be deterior...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30G01B5/28G01B21/30
CPCG01B11/30G01B5/28G01B21/30Y02P90/30
Inventor 胡中伟陆涵钧赖志远崔长彩于怡青徐西鹏
Owner HUAQIAO UNIVERSITY