System and method for tandem VCSEL array
A technology of arrays and sub-arrays, applied in the field of series VCSEL arrays
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[0020] The following provides a detailed description of the present invention as well as the accompanying drawings and embodiments to further clarify the purpose, technical solutions and advantages of the present invention. Note that the exemplary embodiments discussed in the present invention are intended to illustrate the present invention only. The invention is not limited to the disclosed embodiments.
[0021] FIG. 1 shows a cross-sectional view of a prior art VCSEL array 100 . Array 100 includes VCSELs 1 , 2 and 3 on substrate 106 . The VCSELs are separated by isolation trenches. Substrate 106 is a conductive n-type substrate. Note that array 100 may include thousands or tens of thousands of VCSELs. Therefore, three VCSELs are shown here for illustration only. Similarly, in the other figures and descriptions below, only a few VCSELs or VCSEL sub-arrays are used to explain the principles. VCSEL 1, 2 or 3 represents a top emitting VCSEL structure or VCSEL emitter whic...
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