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Single-pixel closed-loop skeleton overlay alignment algorithm

A single-pixel, skeleton-overlay technology, applied in the field of single-pixel closed-loop skeleton overlay alignment algorithms, can solve problems such as inability to guarantee overlay accuracy, and achieve the effect of improving accuracy

Pending Publication Date: 2022-07-12
苏州中特微电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the commonly used method in the industry is to directly establish a template for image matching, which cannot guarantee the overlay accuracy. Based on this, a refined overlay alignment algorithm is proposed, which can effectively improve the exposure accuracy of the lithography machine and improve the exposure quality.

Method used

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  • Single-pixel closed-loop skeleton overlay alignment algorithm
  • Single-pixel closed-loop skeleton overlay alignment algorithm
  • Single-pixel closed-loop skeleton overlay alignment algorithm

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Embodiment Construction

[0028] The following description serves to disclose the invention to enable those skilled in the art to practice the invention. The preferred embodiments described below are given by way of example only, and other obvious modifications will occur to those skilled in the art.

[0029] A single-pixel closed-loop skeleton overlay alignment algorithm, the specific steps are as follows:

[0030] Template image acquisition: Collect the overlay marks on the wafer and the corresponding position on the mask by the CCD camera. A pair of overlay marks includes the outer contour mark and the inner contour mark. The wafer has the inner contour mark, and the mask plate is Outer contour mark, in which the first image acquisition is used to establish a template. At this time, the wafer needs to be moved to separate the outer contour mark and the inner contour mark, so that the outer contour mark and the inner contour mark can be collected separately;

[0031] Template image establishment: re...

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PUM

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Abstract

The invention discloses a single-pixel closed-loop skeleton overlay alignment algorithm, which relates to the field of overlay alignment and comprises the steps of template image acquisition, template image establishment, overlay image acquisition, image preprocessing, feature matching, center positioning calculation, motion data calculation and motion control for alignment of multiple exposure of a photoetching machine. The method has the advantages that a double-view-field closed-loop skeleton matching counterpoint matching algorithm is provided based on double view fields, region selection, bottom-hat transformation, binarization, filtering, single-pixel skeleton extraction, closed-loop contour selection and contour centroid calculation processing are adopted, mark template image data are established, convolution feature matching is combined, and the matching precision is improved. Through matching condition judgment and template information fusion, rapid and accurate alignment of the inner contour mark and the outer contour mark of the image is achieved, the method can adapt to various marks, and the alignment accuracy is effectively improved.

Description

technical field [0001] The invention relates to the field of overlay alignment, in particular to a single-pixel closed-loop skeleton overlay alignment algorithm. Background technique [0002] Overlay alignment technology is an alignment technology applied to multiple exposures of lithography machines. With the development of semiconductors, various overlay marks have appeared, and the overlay alignment algorithm determines the key factor of the overlay accuracy of the automatic exposure machine. At present, the commonly used method in the industry is to directly establish a template for image matching, which cannot guarantee the overlay accuracy. Based on this, a refined overlay alignment algorithm is proposed to effectively improve the exposure accuracy of the lithography machine and improve the exposure quality. Contents of the invention [0003] In order to solve the above technical problems, a single-pixel closed-loop skeleton overlay alignment algorithm is provided. ...

Claims

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Application Information

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IPC IPC(8): G06T7/66G06T7/73G06T7/62G06T7/246G06T7/11G06N3/04G06K9/62G06V10/82G06V10/74
CPCG06T7/66G06T7/73G06T7/246G06T7/11G06T7/62G06T2207/20084G06T2207/30148G06N3/045G06F18/22
Inventor 傅舰艇林世超
Owner 苏州中特微电子科技有限公司