Straightness and roll angle error simultaneous measurement system

Abstract

The invention discloses a straightness and roll angle error simultaneous measurement system, which is characterized in that a fixed unit and a mobile measurement unit form a transceiving integrated structure, and a parallel double-beam method is adopted in the fixed unit to realize measurement; a combined prismatic prism formed by gluing a prismatic prism and a right-angle prism on an inclined plane is used for keeping the parallelism of parallel beams, so that the measurement precision is effectively improved; a blade edge reflector is used as a sensing conversion element in the mobile measurement unit; when a vertical straightness error and a roll angle error exist in the movable workbench, a cutting edge of the cutting edge reflecting mirror is used for cutting a measuring light beam, the light intensity of the reflected light beam is changed, and the photoelectric detector is used for detecting and obtaining light intensity change information, so that high-precision measurement of the vertical straightness error and the roll angle error is realized.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, and more particularly relates to a measurement system capable of simultaneously obtaining straightness and roll angle errors. Background technique [0002] High-precision multi-degree-of-freedom geometric error measurement technology plays an important role in industrial equipment such as precision machine tools, coordinate measuring machines, wafer stages, and surface profilometers in manufacturing or inspection systems. The measurement of these geometric errors is precision machine precision calibration. and an essential task of error compensation. [0003] For a mobile table, there are positioning errors along the motion direction, straightness errors perpendicular to the motion direction (ie horizontal straightness error and vertical straightness error), and angular errors (ie pitch angle error, yaw angle error, and roll angle error) Among them, it is a challenging prob...

AI Technical Summary

Problems solved by technology

[0004] 1. The parallel double-beam method based on the position detector has low sensing accuracy and resolution;

[0005] 2. The parallel double-beam method based on four-quadrant detectors has better sensing accuracy and resolution than position detectors, but the accuracy and linearity are affected by the dead zone gap, and the measurement points are located on two separate detectors. , the installation error of the detector will directly affect the measurement result, and it is not suitable for two-dimensional mobile worktable because of its small sensitive area;

[0006] 3. Two parallel beams are usually produced by using conventional spectroscope components, resulting in low parallelism of the parallel beams, which also affects the measurement accuracy

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