Large-aperture optical element stress detection device and detection method thereof

Abstract

The invention provides a large-aperture optical stress detection device and a detection method thereof, a detection light path uses a linearly polarized laser as input detection light, after beam expansion by a convergent lens, the linearly polarized laser is collimated by a beam splitter prism and a large-aperture collimator objective to enter a large-aperture to-be-detected element, and then the light is reflected by a standard reflector; the light source passes through the to-be-measured element again, is converged by the collimating mirror, is reflected by the beam splitter prism and then is collimated by the collimating mirror, finally, light intensity information is collected by the polarization camera, and visualization of the stress in the large-aperture sample is realized through rear-end data processing; compared with a traditional detection light path, the light path has the advantages that real-time detection of large-aperture stress birefringence can be realized without a wave plate or rotating or moving any part, and errors caused by the wave plate and a motion platform are avoided. According to the method, a splicing algorithm is not needed, the stress distribution of the whole large-aperture sample can be obtained at the same time, and the method can be easily integrated with an existing large-aperture interference light path.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to a large-diameter optical stress detection device and a detection method thereof. Background technique [0002] The magnitude of residual stress is an important indicator for evaluating the performance of optical components, especially for large-diameter components. When there is a large internal stress, the optical glass may be heated, compressed or rapidly cooled during the heating process. rupture. Even if the internal stress is not too large, the surface of the processed optical parts will slowly deform over time due to the internal stress, which seriously affects the imaging quality. In addition, due to the existence of internal stress, the proper isotropic properties of optical glass are destroyed; due to the uneven distribution of internal stress, the quality of optical homogeneity will also be reduced, making the distribution of refractive index inconsistent, ...

AI Technical Summary

Problems solved by technology

[0004] In the existing stress detection device, the larger the measurement caliber, the zero-order wave plate of the same caliber must be equipped, which is an insurmountable shortcoming. Moreover, the existing measurement methods are usually based on interferometry technology, and the sample to be tested needs to be moved during the measurement. However, moving large-diameter samples will inevitably cause large measurement errors, so it is difficult to achieve stress detection with a diameter of 1m and above with current domestic technology

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