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Magnetic levitation planar motor workbench with double-layer winding coarse and fine driving

A planar motor and double-layer winding technology, which is applied to the shape/style/structure of winding conductors, electromechanical devices, electrical components, etc., can solve the problems of difficult processing of special-shaped permanent magnets, large tracking errors, and large output fluctuations. Reliable technical support, small tracking error, and the effect of reducing output fluctuations

Pending Publication Date: 2022-07-29
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the patent [A permanent magnet synchronous magnetic levitation planar motor, CN102097982B] optimizes the design of the permanent magnet array. The permanent magnets have various shapes and different magnetization directions, but in the actual processing process, the processing of special-shaped permanent magnets is relatively difficult. , puts forward higher requirements for the pasting process, it is not easy to produce a magnetic field distribution with good sinusoidal characteristics, and the output force fluctuates greatly during the movement, resulting in poor stability, large tracking error, and low positioning accuracy.

Method used

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  • Magnetic levitation planar motor workbench with double-layer winding coarse and fine driving
  • Magnetic levitation planar motor workbench with double-layer winding coarse and fine driving
  • Magnetic levitation planar motor workbench with double-layer winding coarse and fine driving

Examples

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Effect test

Embodiment 1

[0049] like figure 1 As shown, this embodiment provides a six-degree-of-freedom magnetic levitation plane motor table with double-layer winding rough and fine drive, including a stator 4 and a mover 8 .

[0050] The stator 4 includes a plurality of vertically magnetized permanent magnets 1, a plurality of horizontally magnetized permanent magnets 2 and a base 3, wherein the plurality of vertically magnetized permanent magnets 1 and a plurality of horizontally magnetized permanent magnets 2 are arranged in a Halbach manner to form a permanent magnet. The magnetic array structure increases the magnetic field above the permanent magnet and weakens the magnetic field below, so the mover 8 is arranged above the permanent magnet array. The magnetization directions of the vertical magnetization permanent magnet 1 and the horizontal magnetization permanent magnet 2 are as follows: figure 2 shown by the arrow in the middle. The vertically magnetized permanent magnet 1 and the horizo...

Embodiment 2

[0062] The difference between this embodiment and the first embodiment is that the arrangement of the rectangular coils in the first winding 6 and the second winding 7 of the mover is different, and the relative positions of the first winding 6 and the second winding 7 are different. Other structures and connections All are the same as Example 1. details as follows:

[0063] like Figure 4 As shown, in this embodiment, the first winding 6 includes three sets of second single-phase windings, and each second single-phase winding includes four rectangular coils stacked in sequence in a stepped shape, wherein one set of second single-phase windings is laid flat In the middle, the other two sets of second single-phase windings are vertically placed on the upper left and lower right steps of the second single-phase windings in the middle, and are attached to each other at the step connection of the second single-phase windings in the middle. The long sides of the rectangular coils...

Embodiment 3

[0066] The difference between this embodiment and the first embodiment is that the arrangement of the rectangular coils in the first winding 6 and the second winding 7 of the mover is different, and the relative positions of the first winding 6 and the second winding 7 are different. Other structures and connections All are the same as Example 1. details as follows:

[0067] like Figure 5 As shown, in this embodiment, the first winding 6 includes 7 rows, 2 rectangular coils in each row, the short sides of adjacent rectangular coils in each row are connected, and one rectangular coil in a row can be translated along the long side direction with another rectangular coil The coils are concentric, and the adjacent rows are staggered left and right.

[0068] The second winding 7 has the same structure and different thickness as the first winding 6. The long side of the rectangular coil in the first winding 6 and the long side of the rectangular coil in the second winding 7 are p...

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Abstract

The invention discloses a magnetic levitation planar motor workbench with double-layer winding coarse and fine driving, and belongs to the technical field of planar motors, the magnetic levitation planar motor workbench comprises a stator and a rotor, and a vertical magnetized permanent magnet and a horizontal magnetized permanent magnet in the stator are arranged according to a Halbach mode; the mover is located on the reinforcing side of an air-gap magnetic field above the stator. The mover adopts unequal-height double-layer coil windings, and the height of an upper-layer first winding is smaller than that of a lower-layer second winding. Each layer of winding can generate driving force in six directions, and six-degree-of-freedom driving is achieved. In the variable-speed motion stage, high-acceleration and low-precision motion control is achieved through large driving force generated by the second winding on the lower layer; in the constant-speed linear motion stage, driving force with high precision and small fluctuation is generated through the upper-layer first winding to achieve constant-speed motion. According to the invention, the output fluctuation in the movement process can be reduced, the movement precision is improved, the stability of the workbench is good, the tracking error is small, and the positioning precision is high.

Description

technical field [0001] The invention belongs to the technical field of plane motors, and more particularly, relates to a magnetic levitation plane motor worktable with double-layer winding rough and fine drive. Background technique [0002] With the development of nano-precision processing equipment technology represented by integrated circuits, micro-electromechanical systems, spatial optical components, etc., higher requirements are put forward for the stroke, acceleration and positioning accuracy of the motion platform. As the key equipment in the IC manufacturing process, the lithography machine integrates various cutting-edge technologies such as light, electricity, magnetism, and heat. Among them, the magnetic levitation plane motor, as the core component of the next-generation lithography machine, can realize precise operation control on a long stroke. control. [0003] In the field of semiconductor manufacturing, traditional ultra-precision workbenches usually use m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K41/035H02K1/17H02K3/04H02K3/28
CPCH02K41/0356H02K1/17H02K3/04H02K3/28H02K2201/03H02K2213/03
Inventor 曾理湛刘凯赵烁陈福祥胡傲奇张昊陈学东
Owner HUAZHONG UNIV OF SCI & TECH
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