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High-sensitivity micro-accelerometer based on singular point and use method of high-sensitivity micro-accelerometer

A micro-accelerometer, high-sensitivity technology, applied in the direction of speed/acceleration/shock measurement, measurement of acceleration, instruments, etc., can solve the problem of low sensitivity and achieve the effect of improving sensitivity

Pending Publication Date: 2022-08-05
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the object of the present invention is to provide a kind of high-sensitivity micro-accelerometer based on singularity and its using method, this method is aimed at the problem of low sensitivity of micro-accelerometer at present, built parity-time symmetry in micro-accelerometer system, and the use of the singularity greatly improves the sensitivity of the micro-accelerometer to small disturbances

Method used

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  • High-sensitivity micro-accelerometer based on singular point and use method of high-sensitivity micro-accelerometer
  • High-sensitivity micro-accelerometer based on singular point and use method of high-sensitivity micro-accelerometer
  • High-sensitivity micro-accelerometer based on singular point and use method of high-sensitivity micro-accelerometer

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] For details, see figure 2 , the head and tail ends of the first resonator A are connected to the coupling beam 201 fixed to the anchor region electrode 202 through short beams;

[0052] The first driving electrode A2 is placed on the left side of the first resonator A, and is used for connecting AC voltage and DC voltage;

[0053] The first detection electrode A1 is placed between the first resonator A and the first driving electrode A2, and is used for connecting a DC voltage to detect the motion signal of the first resonator A.

[0054] The head and tail ends of the second resonator B are connected to the coupling beam 201 fixed to the anchor region electrode 202 through short beams;

[0055] The second driving electrode B2 is placed on the right side of the second resonator B for connecting the AC voltage and the DC voltage;

[0056] The second detection electrode B1 is placed between the second driving electrode B2 and the second resonator B, and is used for conn...

Embodiment 2

[0067] Damping coefficient c of first resonator A and second resonator B 1 ≠c 2 , the singular point still exists in the resonator system at this time:

[0068]

[0069] The same conclusion can be drawn.

[0070] The working principle of the micro-accelerometer is:

[0071] The mass of the first resonator A is known to be m 1 , the stiffness is k 1 , the mass of the second resonator B is m 2 , the stiffness is k 2 , and satisfy m 1 =m 2 =m,k 1 =k 2 =k.

[0072] The damping adjustment circuit is adjusted to adjust the damping coefficients of the first resonator A and the second resonator B to satisfy the condition of the singular point, and the resonant system vibrates at a resonant frequency at this time.

[0073] The resonant system is placed in the acceleration environment to be measured, and the acceleration to be measured will disturb the stiffness of the second resonator B by Δk, so that the resonant system is far away from the singular point, and the resona...

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Abstract

The invention discloses a singular point-based high-sensitivity micro-accelerometer and a use method thereof, and the micro-accelerometer comprises a first resonator and a second resonator which have the same mass, the same rigidity and opposite damping symbols; the two resonators are respectively connected with: a driving electrode for accessing an AC voltage or a DC voltage; the detection electrodes are used for accessing direct-current voltage and detecting motion signals of the corresponding resonators; the damping adjusting circuit is used for converting motion signals of the resonators connected with the damping adjusting circuit into electric signals and feeding the electric signals back to the corresponding resonators so as to adjust damping coefficients of the resonators; by adjusting the damping adjusting circuit, the damping coefficients of the first resonator and the second resonator are adjusted to meet the singular point condition, and at the moment, the micro-accelerometer vibrates at a resonant frequency.

Description

technical field [0001] The invention relates to the technical field of micro-accelerometers, in particular to a high-sensitivity micro-accelerometer based on singular points and a method for using the same. Background technique [0002] In 1977, the University of Standford in the United States took the lead in using micromachining technology to manufacture an open-loop silicon accelerometer on a silicon wafer and used it in the biomedical field, marking the birth of the micro-accelerometer. Since then, micro-accelerometers have been widely used in aerospace, automotive, military, consumer electronics and other fields. With the continuous development of micro-accelerometers, higher requirements are also placed on the measurement sensitivity of the accelerometers. One method is to optimize the structure of the micro-accelerometers, but this method requires relatively high process processing and realizes comparison. complex; another approach is to explore new mechanisms to inc...

Claims

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Application Information

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IPC IPC(8): G01P15/097
CPCG01P15/097
Inventor 黄庆安张曼娜王立峰
Owner SOUTHEAST UNIV