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Cutter fixing part and cutter mounting seat

A technology for fixing parts and tools, applied in the field of tool fixing parts and tool mounting seats, can solve the problems of increasing cutting tool costs, rising cutting tool prices, rising costs, etc., and achieving the effect of cost suppression

Pending Publication Date: 2022-08-09
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, when the above-mentioned plate-shaped structure is integrally provided to the cutting tool, the cost of manufacturing the cutting tool increases, and the price of the cutting tool increases.
Cutting tools are so-called consumables and are replaced at high frequency, so the increase in the price of cutting tools will significantly increase the cost of processing the workpiece

Method used

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  • Cutter fixing part and cutter mounting seat
  • Cutter fixing part and cutter mounting seat
  • Cutter fixing part and cutter mounting seat

Examples

Experimental program
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Effect test

Embodiment Construction

[0018] Hereinafter, embodiments of the present invention will be described with reference to the drawings. figure 1 It is a perspective view which shows typically the cutting apparatus 2 using the tool holder of this embodiment. In addition, in figure 1 Among them, elements constituting a part of the cutting device 2 are represented by functional blocks. In addition, the X-axis direction (machining feed direction), the Y-axis direction (indexing feed direction), and the Z-axis direction (cutting feed direction) used in the following description are perpendicular to each other.

[0019] The cutting device 2 has a frame (not shown) that supports each element. like figure 1 The frame is covered by a cover 4 as shown. A space for cutting the plate-shaped workpiece 11 is formed inside the frame and the cover 4 , and the cutting unit 6 is accommodated in the space. The cutting unit 6 is supported by a cutting unit moving mechanism (not shown), and is moved in the Y-axis directi...

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PUM

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Abstract

The invention provides a tool holder and a tool mount, which can reduce the manufacturing cost of a cutting tool as a consumable and increase the amount of cutting fluid supplied to a workpiece. The present invention relates to a tool holder for fixing an annular cutting tool to a mounting flange, the mounting flange having a cylindrical hub part and a thread provided on the outer peripheral surface thereof, the cutting tool having an opening and being used in a state in which a cutting fluid is supplied, the tool holder includes: an annular nut having an opening portion into which the hub portion is inserted and provided with a thread corresponding to the thread of the hub portion on the inner peripheral surface of the opening portion; and a disc-shaped cutting fluid return plate having an opening portion into which the hub portion is inserted, the outer diameter of the cutting fluid return plate being larger than the outer diameter of the nut.

Description

technical field [0001] The present invention relates to a tool holder for fixing an annular cutting tool to a mounting flange, and a tool mount including the tool holder. Background technique [0002] When processing a plate-shaped workpiece such as a semiconductor wafer, for example, a cutting device in which a ring-shaped cutting tool is attached to a spindle is used. The workpiece can be cut (cut) along the moving path by relatively moving the cutting tool and the workpiece while the cutting tool rotating at high speed is cut into the workpiece. [0003] In addition, when the rotating cutting tool is cut into the workpiece, a large amount of chips (chipping chips) are generated by cutting the workpiece. When the chips adhere to the workpiece, defects are likely to occur in devices or the like provided in the workpiece. In addition, when the chips are fixed to the workpiece, the chips cannot be easily removed from the workpiece even if the workpiece is subsequently washe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B27/06B24B45/00B24B41/06H01L21/67
CPCB24B27/06B24B27/0683B24B45/003B24B41/068H01L21/67092B26D1/143B28D5/0076B28D5/022
Inventor 美细津祐成
Owner DISCO CORP