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Method for producing discharge lamp comprising and electrode support

A discharge lamp and electrode technology, which is applied in the manufacture of discharge tubes/lamps, electrode system manufacturing, discharge lamps, etc., can solve the problems of reduced efficiency of discharge lamps, and achieve the effect of increasing product costs and reliable positioning

Inactive Publication Date: 2005-04-27
PATENT TREUHAND GESELLSCHAFT FUR ELECTRIC GLUEHLAMPEN MBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the electrode geometry, small changes in the position of the electrodes can lead to a considerable reduction in the efficiency of the discharge lamp

Method used

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  • Method for producing discharge lamp comprising and electrode support
  • Method for producing discharge lamp comprising and electrode support
  • Method for producing discharge lamp comprising and electrode support

Examples

Experimental program
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Embodiment Construction

[0035] figure 1 A first embodiment of the discharge lamp according to the invention is shown. The discharge lamp 1 has a discharge vessel 2 made of quartz glass, wherein one end of the discharge vessel is fastened in a base 5 .

[0036] The interior of the discharge chamber 2 is filled with a discharge medium. In this embodiment a xenon-filled excimer discharge lamp is involved. With such an excimer discharge lamp, VUV radiation can be efficiently emitted, wherein such radiation is used in wafer cleaning, ozone production or water purification.

[0037] The lamp has a helical electrode 6 within a cylindrical discharge. Here is the cathode to which a negative high voltage is applied. On the outside of the discharge chamber 2 there are a plurality of strip electrodes 7 extending parallel to the column axis. Here it is the anode. They are separated from the discharge space by the wall 3 of the discharge space 2 . The lamp is thus designed for dielectric blocking discharge. ...

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PUM

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Abstract

The invention relates to a method for producing a discharge lamp, which is preferably designed for dielectric barrier discharges. The innovation is that a frame is used in order to set, and secure in its position, an electrode running at a distance from the vessel faces in the discharge vessel of the discharge lamp. This frame is simultaneously used as an exhaust tube.

Description

technical field [0001] The invention relates to a method of manufacturing a discharge lamp having a discharge vessel filled with a discharge medium and having an electrode extending in the discharge vessel away from the wall, wherein a pump is mounted on the discharge vessel during manufacture. A suction pipe, through which the discharge chamber is evacuated and / or filled with a discharge medium, and the suction pipe is subsequently sealed. Background technique [0002] In the manufacture of the discharge vessel, a thin tube or the like is usually used as a suction tube for sealing, wherein the thin tube passes through and projects out of the wall of the discharge vessel. Then, after the discharge chamber has been closed together with the suction line, a vacuum pump is connected outside the suction line and the discharge chamber is evacuated to the desired pressure. The discharge chamber is then filled with a discharge medium, generally a gas or a gas ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J9/385H01J9/24H01J61/02H01J65/00
CPCH01J9/245H01J65/046H01J61/02H01J61/04
Inventor R·克林R·维特克特
Owner PATENT TREUHAND GESELLSCHAFT FUR ELECTRIC GLUEHLAMPEN MBH