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Method and apparatus for measuring far-ultraviolet laser scratch of interface jointing strength

A technology of interface bonding strength and measuring devices, which is applied in the directions of measuring devices, color/spectral characteristic measurement, mechanical devices, etc., can solve the problems that soft films cannot be measured, the thickness of test pieces is limited, and the scratch mechanism is complicated, etc., to achieve Facilitate measurement automation, accurate and convenient measurement, convenient and fast guidance and energy transmission

Inactive Publication Date: 2006-08-30
JIANGSU UNIV
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Problems solved by technology

[0008] 2. The scratch mechanism is complex
[0010] 4. It is only suitable for the measurement of hard films, and cannot be measured for soft films; in addition, the film thickness requirement should usually be greater than 2 μm
The disadvantage is that the thickness of the test piece is limited (0.1 ~ 0.2mm), and the surface of the film should be specially treated to form a reflective surface

Method used

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  • Method and apparatus for measuring far-ultraviolet laser scratch of interface jointing strength
  • Method and apparatus for measuring far-ultraviolet laser scratch of interface jointing strength
  • Method and apparatus for measuring far-ultraviolet laser scratch of interface jointing strength

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Embodiment Construction

[0036] Such as figure 1 As shown, the system involved in this method consists of a scratch system, a specimen fixture system, a detection system, a control system and a frame.

[0037] The method is as follows: the far-ultraviolet laser 24 in the resonant cavity 23 of the scratch laser 1 passes through the incident laser beam optical path system composed of an adjustable diaphragm 22, beam splitters 21, 20, a light guide system 18 with an attenuator, and a focusing mirror 16. It is directly loaded on the surface of the film of the sample 13 installed on the fixture 12. The test piece 13 is composed of the substrate 27 and the film 26 on it. The laser energy is continuously increased through the laser power supply and the control system 2, and the work of the feeding system is simultaneously carried out. The table 11 drives the fixture 12 and the test piece 13 to make a feed movement. The far-ultraviolet laser acts on the surface of the thin film sample, and realizes the ablat...

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Abstract

This invention relates to laser test and material performance test in which a continuously loading pulse avaser beam loads to the film surface of a subject directly via an incident laser beam optical path system to form lattice defect and plasma after optical decomposing, and valence photochange to realize erosion process to the subject or even break ibnding keys among moleculars or crystals to some materials by photons directly to break-off the film materials. At the same time, feeding system makes the subject to do feed movement, laser beam forms steadily deepened mars on the film surface until breaks down the film-matrix interface then the said laser beam energy energy is processed by a certain mathematical modeles to express the binding strength of the film-matrix interface.

Description

Technical field [0001] The invention relates to the technical field of laser detection and material performance detection, in particular to a far-ultraviolet laser scratch measurement method and device for interface bonding strength, which is suitable for various hard tool films, decorative film systems, decorative functional films, DLC films, Determination of the interfacial bonding strength of organic polymer materials, composite materials and other types. Background technique [0002] Wear, corrosion and fatigue are the three main forms of failure of parts or components during the working process, especially under the working conditions of high speed, high temperature, high pressure, heavy load, corrosive medium, etc., often due to local damage to the surface of parts or components Make it scrapped, and eventually lead to scrapping the equipment. Most of these failure phenomena occur on the surface of the material, so taking various measures to improve the surface perfor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N19/04G01N3/56G01N21/33G01N21/84
Inventor 张永康冯爱新周明谢华琨蔡兰
Owner JIANGSU UNIV
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