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Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof

A technology of integrated circuits and filter devices, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve problems such as inapplicable concepts

Inactive Publication Date: 2006-11-29
INT BUSINESS MASCH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0021] None of the previous patents suggested the use of mechanical vibrations for this process, and therefore are not applicable to the concept of the present invention

Method used

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  • Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof
  • Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof
  • Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof

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Embodiment Construction

[0038] as in the accompanying drawings generally represented diagrammatically figure 1 As depicted, a side view of a microelectromechanical system (MEMS) device 10 for mixing and filtering a carrier signal is shown. The MEMS 10 device comprises a central bar 12 clamped at both ends 14, 16, as shown by blocks 18 and 20 of the diagram. The central strip 12 essentially consists of an insulating core plated with conductive layers 22 and 24 on both sides. As shown in this embodiment, a fixed plate 26 is placed on top of the central bar, which is made of conductive material and is connected to a source 28 of an input signal IS. The upper conductive plating 22 above the central bar 12 is connected to a source 30 of a local oscillator signal LO. The central bar 12 vibrates in response to a combined force, typically from the electrical interaction of the input signal IS and the oscillator LO signal. Because the two ends of the central bar 12 are clamped by the clamps or blocks 18, 2...

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Abstract

Communication signal mixing and filtering systems and methods utilizing an encapsulated micro electro-mechanical system (MEMS) device. Furthermore, disclosed is a method of fabricating a simple, unitarily constructed micro electro-mechanical system (MEMS) device which combines the steps of signal mixing and filtering, and which is smaller, less expensive and more reliable in construction and operation than existing devices currently employed in the technology.

Description

[0001] The application of the present invention is a divisional application of the invention with the application number 01121085.0 submitted by the applicant on June 18, 2001, which is entitled "Integrated Circuit Micro-Electro-Mechanical System Band-Pass Filter and Its Manufacturing Method". technical field [0002] The present invention relates to communication signal mixing and filtering systems and methods using packaged microelectromechanical systems (MEMS) devices. Furthermore, the object of the present invention is a method of manufacturing a simple monolithic microelectromechanical system (MEMS) device, which combines the steps of signal mixing and filtering, which is smaller and more compact than the devices used in the prior art. Cheaper and more reliable in construction and operation. Background technique [0003] Microelectromechanical systems (MEMS) technology has been proposed for the fabrication of narrow bandpass filters (high-Q filters) for various communic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00H01P1/20B81B3/00B81B7/00H03D7/00H03H3/007H03H9/10H03H9/24H03H9/46H04B1/26
CPCH03H3/0072H03H9/1057H03H9/2463H03H9/465
Inventor K·K·陈C·杰尼斯L·施J·L·斯佩德尔J·F·兹格勒
Owner INT BUSINESS MASCH CORP