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Probe device and its manufacturing method

A probe and probe sheet technology, which is used in measuring devices, manufacturing measuring instruments, and electronic circuit testing, etc., can solve the problems of increased probe resistance, difficulty in contact between the test piece electrode and probe, and probe detachment. The effect of preventing damage, improving usability, and reducing resistance

Inactive Publication Date: 2007-01-24
YAMAICHI ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is necessary to set the overdrive to be larger, and the possibility of the probe detaching from the top surface of the electrode will also increase
Furthermore, when the probe is miniaturized, the pressure applied to the test piece electrode and the probe during overdrive becomes smaller, and it becomes difficult to ensure that the test piece electrode is in contact with the probe.
Also, when the probe is miniaturized, the resistance of the probe also becomes larger

Method used

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  • Probe device and its manufacturing method
  • Probe device and its manufacturing method
  • Probe device and its manufacturing method

Examples

Experimental program
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Embodiment Construction

[0053] First, the basic structure of a probe device according to an embodiment of the present invention will be explained.

[0054] Figure 1A to Figure 1C and FIG. 33 is a plan view of the corresponding relationship between the probe device 1 and the test piece 5 according to the embodiment of the present invention.

[0055] Such as Figure 1A to Figure 1C As shown in FIG. 33 , the probe device 1 includes a probe sheet having a plurality of probes 10 arranged such that their protruding bases 14 are integrally connected to a base 20 . Such as Figure 1A , Figure 1B and Figure 1C As shown, when the spacing of the probes 10 is set such that multiple probes 10 are in contact with one electrode 50, the applicability of the probes to various electrode spacings of the specimen will be improved. In addition, as the pitch of the probes 50 becomes smaller, the general applicability of the probes to the electrode pitch will be improved. In addition, since each probe 10 is deformab...

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Abstract

The probe unit comprises a base 20 and a comb-like probe sheet having a plurality of probes 10 connected at their base ends in one body by the base 20. The probe 10 is expanded at the top end 12 and this expanding prevents the probe 10 from dropping from the top face of an electrode 50 of a sample 5 under test. The top ends of the plurality of probes 10 are made uneven along the arranging line of the probes 10 to allow the top end 12 of the probe 10 to be expanded, without increasing the pitch of the center axial line of each probe 10. This allows the minimum gap between the adjacent probes 10 to be reduced in their arranging direction. Thus the availability is raised for the sample 5 having a plurality of thin and long electrodes 50 like parallel lines, without reducing the pitch of each probe 10.

Description

[0001] This application is based on Japanese Patent Application No. 2003-130529 filed on May 8, 2003, the entire contents of which are incorporated herein by reference. technical field [0002] The present application relates to a probe device for probing electrical properties of electronic devices such as semiconductor integrated circuits and liquid crystal panels, and a manufacturing method thereof. Background technique [0003] In the prior art, a well-known method for probing electrical properties of an electronic device is accomplished by contacting the ends of a comb-shaped electrical conductor with a plurality of electrodes of the electronic device. [0004] Japanese Laid-Open Patent No. 1983-83271 discloses a detection method using a comb-shaped electric conductor made of silicon. In the comb-toothed electric conductor disclosed in Japanese Laid-Open Patent No. 1983-83271, probes are arranged in a comb-tooth shape, and the distance between the teeth of the comb is na...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R1/073H01L21/66G01R31/26G01R3/00G01R31/28
CPCG01R1/06738G01R1/07342G01R3/00G01R31/2601
Inventor 服部敦夫泽田修一
Owner YAMAICHI ELECTRONICS