Improved chemical vapor-phase deposition method by uisng graphite heating furnace as hot source
A technology of chemical vapor deposition and graphite heating furnace, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve problems such as increasing equipment investment and operating costs, affecting transmission system windows, and hidden dangers of hydrogen safety , to achieve the effects of reduced attenuation, increased deposition rate, and enlarged reaction area
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Embodiment 1
[0018] Such as figure 1 As shown, a quartz liner 102 for deposition reaction is fixed horizontally on the MCVD bed 101 . There is a heated area 103 inside the quartz liner, and the heat of the heated area is generated by a heating medium 104 . The heating equipment of the present invention is a graphite resistance heating furnace, a tubular heating furnace with graphite components as heating elements and graphite components or others as bushings. During the deposition and rod forming process, the quartz liner is located in the central part of the graphite resistance heating furnace; and it is continuously rotating, as shown by the rotation arrow 105a in the figure. As mentioned above, the heated zone 103 of the quartz liner is heated by a graphite resistance heating furnace fixed to a screw drive unit 106 . The screw driving device 106 can horizontally move back and forth on the MCVD bed at a constant speed; thereby driving the graphite resistance heating furnace to move bac...
Embodiment 2
[0025] Another embodiment of the present invention is to change the graphite resistance heating furnace in Example 1 into a graphite induction heating furnace, and other operations are the same.
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