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Scanning probe microscope

A technology of scanning probe and microscope, which is applied in the field of scanning probe microscope, can solve the problems of image instability, low resolution, and limited application range, and achieve the effect of reducing image distortion and preventing scratching of samples

Inactive Publication Date: 2004-04-21
北京中科奥纳科技有限公司
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  • Abstract
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Problems solved by technology

However, due to the influence of air and other environmental factors, its resolution is very low, and the resolution must be lower than that of the contact mode; moreover, the needle tip of this non-contact mode is easily adsorbed on the surface of the sample, causing image instability and damage to the sample, so It is only suitable for observing samples that are not easily adsorbed, and the application range is not wide

Method used

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Embodiment Construction

[0022] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0023] Such as figure 1 and figure 2 As shown, the scanning probe microscope of the present invention includes a laser tube 1 , a mirror 2 , a piezoelectric ceramic crystal 4 , a microcantilever 3 , a needle tip 5 , a scanning tube 6 , a mirror 8 , a spot position detector 9 , and a sample 7 . The piezoelectric ceramic crystal 4 controlled by the oscillation frequency controller 10 drives the microcantilever 3 to oscillate with a certain oscillation frequency and amplitude. When the vibration frequency of the needle tip is the same as the natural frequency of the needle tip, a resonant peak will appear, and the amplitude at this time is converted into an electrical signal by the control circuit, and the microcantilever 3 with the needle tip 5 is made to have this amplitude under the control of the control system. Oscillate on the surface of sample 7. As t...

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Abstract

A microscope consists of microcantilever equipped with pinpoint and the microcantilever is fixture-connected with oscillation device as the pinpoint is located at one end of the microcantilever and the oscillation device is located at another end of the microcantilever. The said oscillation device consists of pizeoelctric ceramic crystal and oscillating frequency controller to control oscillating frequency and vibration amplitude for the piezoelectric ceramic crystal with which the microcantilever is fixed.

Description

technical field [0001] This invention relates to microscopic instruments for precision surface analysis, in particular a scanning probe microscope. Background technique [0002] Scanning probe microscopy is a morphology characterization instrument, which has the advantage of low requirements on the sample environment and can observe the sample surface at the nanoscale with high resolution. The scanning probe microscope in the prior art is divided into two modes according to the mode of interaction between the probe and the surface of the sample to be observed: one is a contact mode, and the other is a non-contact mode. [0003] The scanning probe microscope in contact mode uses the short-range interatomic repulsion interaction between the tip and the sample to image. The tip is located under the top of the "V"-shaped microcantilever made by photolithography. Small, generally less than 30nm, it can detect long-range forces such as magnetic force, electrostatic force and van ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/00
Inventor 王宏奚爽李丹芸
Owner 北京中科奥纳科技有限公司
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