Scanning probe microscope

A technology of scanning probe and microscope, which is applied in the field of scanning probe microscope, can solve the problems of image instability, low resolution, and limited application range, and achieve the effect of reducing image distortion and preventing scratching of samples
CN1490606AInactive Publication Date: 2004-04-21北京中科奥纳科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
北京中科奥纳科技有限公司
Publication Date
2004-04-21
Estimated Expiration
Not applicable · inactive patent

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Abstract

A microscope consists of microcantilever equipped with pinpoint and the microcantilever is fixture-connected with oscillation device as the pinpoint is located at one end of the microcantilever and the oscillation device is located at another end of the microcantilever. The said oscillation device consists of pizeoelctric ceramic crystal and oscillating frequency controller to control oscillating frequency and vibration amplitude for the piezoelectric ceramic crystal with which the microcantilever is fixed.
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Description

technical field

[0001] This invention relates to microscopic instruments for precision surface analysis, in particular a scanning probe microscope. Background technique

[0002] Scanning probe microscopy is a morphology characterization instrument, which has the advantage of low requirements on the sample environment and can observe the sample surface at the nanoscale with high resolution. The scanning probe microscope in the prior art is divided into two modes according to the mode of interaction between the probe and the surface of the sample to be observed: one is a contact mode, and the other is a non-contact mode.

[0003] The scanning probe microscope in contact mode uses the short-range interatomic repulsion interaction between the tip and the sample to image. The tip is located under the top of the "V"-shaped microcantilever made by photolithography. Small, generally less than 30nm, it can detect long-range forces such as magnetic force, electrostatic force and van ...

Claims

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