Mask for vacuum deposition and organic el display panel manufactured by using the same

Abstract

A mask for vacuum deposition capable of adjusting tension of a mask for vacuum deposition and easily dismounting the mask for vacuum deposition from a mask frame and an organic EL display panel are provided. A mask 1 for vacuum deposition that is held by a mask frame 11 is provided. The mask comprises a mask body 10 for vacuum deposition; a guide member 12 adhered to at least one side of the mask body 10 for vacuum deposition; a tension applying means 14 for applying predetermined tension to the mask body 10 for vacuum deposition via the guide member 12 when the guide member 12 is held by the mask frame 11; and a fixing means 21 for fixing the guide member and mask frame in the vertical direction to a mask surface.

Description

technical field [0001] The invention relates to a mask for vacuum evaporation and an organic electroluminescence (organic EL) display panel manufactured by using the mask. Background technique [0002] Recently, with the development of colorization, the minimum RGB pixel pitch of light-emitting elements such as organic EL has been miniaturized to 50 μm, and people are also studying for even smaller pixels. [0003] On the other hand, the size of the vapor deposition mask used for its production is about 400 mm to 500 mm, and it tends to become larger due to the increase in size of display panels such as organic EL. [0004] In this way, the size of the vapor deposition mask becomes larger and the mask pitch thereof becomes smaller. If the mask pitch of the enlarged vapor deposition mask becomes smaller, the rigidity of the vapor deposition mask (mask) itself decreases, and when the vapor deposition mask is fixed to the mask frame of the holding member, Since deflection occ...

AI Technical Summary

Problems solved by technology

[0007] However, in the method of fixing the vapor deposition mask on the mask frame by the conventional method, it is difficult to adjust the tension of the vapor deposition mask after the fixation. When deflection occurs due to some reasons, there are problems that cannot be corrected

[0008] In addition, it is difficult to remove the vapor deposition mask from the mask frame, and cleaning becomes troublesome. Moreover, when the mask pattern of the vapor deposition mask is changed, the vapor deposition mask cannot be changed, so that the Mask Frames for Reuse Issues

[0009] Furthermore, in the above-mentioned method called the "piercing method" used for laying the frame of the metal mask for screen printing, fine adjustment of the tension cannot be performed, so it is difficult to apply it to the organic EL display panel that requires high precision. in the vapor deposition mask

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